Multimodal Defect-Cause Recommendation for Manufacturing Processes
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Solution Overview
Problem
Identifying the cause of defects in manufacturing processes, such as semiconductor manufacturing, is time-consuming for human experts and often loses important image information during classification, and existing systems lack effective analysis tools for cross-referencing defect patterns.
Innovation Solution
A neural network model is employed to receive user inquiries about defect phenomena, encode information using text and image modalities, and generate responses by searching for similar cases through a matching module, including a transformer-based encoder and a large language model to recommend defect-causing processes, facilities, and chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If human experts manually classify defect patterns and identify defect-causing facilities, then analysis accuracy can be maintained, but the time required for defect analysis becomes significantly large
Solution Approach 1:
The patent replaces the manual mechanical process of human experts classifying defect patterns with an automated neural network model. The model encodes defect images and text information, searches for similar cases in a database, and recommends defect-causing processes, thereby eliminating the time-consuming manual classification while maintaining analysis accuracy through computational intelligence
Solution Approach 2:
The system enables self-service defect analysis by allowing users to input defect information and receiving automated recommendations from the neural network model without requiring expert intervention. The model independently performs encoding, similarity searching, and defect cause recommendation, making the defect analysis process autonomous and accessible to non-experts
2Ease of operation
If defect images are codified into classification categories, then defect pattern classification is simplified, but important image information is lost
Solution Approach 1:
The patent segments the defect analysis into multiple modalities: text information encoding and image information encoding are performed separately by different encoders (text encoder and image encoder). This segmentation allows each modality to be processed independently while preserving their unique characteristics, preventing information loss that would occur in traditional single-category codification
Solution Approach 2:
The system creates a composite representation by combining text features and image features into a unified query vector through an adapter module. This composite approach integrates the simplicity of text classification with the rich visual information from images, achieving both ease of operation and information preservation
3Adaptability or versatility
If a separate analysis system is implemented for cross-analysis of defect-suspected facilities, then comprehensive defect analysis is enabled, but system complexity increases
Solution Approach 1:
The neural network model serves multiple functions within a single integrated system: it encodes text information, encodes image information, searches for similar cases, and recommends defect-causing processes. This multi-functionality eliminates the need for separate analysis systems while maintaining comprehensive defect analysis capabilities across different facilities and processes
Solution Approach 2:
The patent merges the text encoding module, image encoding module, similarity searching module, and recommendation module into a single integrated neural network model. This consolidation combines multiple analysis functions that would traditionally require separate systems, reducing overall system complexity while enhancing adaptability and versatility in defect analysis
Data Source
AI summary
An apparatus and method for recommending a defect-causing process are disclosed. The apparatus for recommending a defect-causing process includes a communication interface configured to receive a user's inquiry including identification information related to a defect phenomenon occurring in a target process, and a neural network model configured to search for a similar case related to the defect phenomenon by encoding information related to the defect phenomenon based on the identification information and generate a response to the user's inquiry by using a prompt generated based on the user's inquiry and the similar case.


