Multimode Laser Beam Splitting for More Precise Focused Spots
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Solution Overview
Problem
Existing laser processing systems using multimode laser beams face challenges in increasing the number of focused spots while maintaining processing speed and accuracy due to low beam quality, which is exacerbated by the complexity of designing large-area diffractive optical elements.
Innovation Solution
The system employs a wedge plate to split the laser beam into multiple beams with reduced spatial modes, followed by a diffractive optical element to further divide these beams, and optionally uses a focusing element array or deflector array to enhance beam quality and focus spots without requiring large-area DOEs with complex patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a large-area diffractive optical element with complex patterns is used to increase the number of focused spots, then the processing speed and throughput are improved, but the device complexity and manufacturing difficulty increase significantly
Solution Approach 1:
The patent divides the laser beam into multiple beams using a beam splitter array, and then each beam is further divided by individual diffractive optical elements. This segmentation approach avoids the need for a single large-area DOE with complex patterns, reducing manufacturing difficulty while maintaining high processing speed through parallel processing of multiple beams
Solution Approach 2:
The patent transitions from using a single large-area DOE in one dimension to using multiple smaller DOEs arranged in an array across multiple dimensions. This dimensional transformation allows the system to achieve the same number of focused spots through spatial distribution of simpler components rather than a single complex component
2Manufacturing precision
If the number of spatial modes in the laser beam is reduced to improve beam quality, then the focused spot diameter decreases and processing accuracy improves, but the number of focused spots that can be generated is limited
Solution Approach 1:
The patent segments the multimode laser beam into multiple beams using a beam splitter array, where each beam contains a reduced number of spatial modes. This allows each beam to be focused to a small spot diameter for high precision processing, while the multiplicity of beams compensates for the reduced modes per beam by providing parallel processing channels to achieve high throughput
Solution Approach 2:
The patent changes the parameter of spatial modes by splitting the original beam into multiple beams with different mode distributions. Each split beam has fewer spatial modes than the original beam, improving beam quality and focusability, while the overall system maintains high productivity through the combined output of multiple processed beams
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach increases the number of focused spots, improving processing speed and accuracy by reducing the diameter of each spot, while allowing the use of existing DOEs, thus enhancing throughput without complex pattern design.
Implementation Method 1
a splitting optical element disposed in an optical path of the laser beam and configured to split the laser beam into multiple split beams each having the spatial modes with the number thereof reduced
Implementation Method 2
at least one dividing diffractive optical element configured to divide each of the multiple split beams into multiple divided beams at a surface of a workpiece
Implementation Method 3
The excimer laser beam having photon energy higher than chemical binding energy of a polymer material can unbind a chemical bond in the polymer material
Data Source
AI summary
A laser processing system according to an aspect of the present disclosure includes a laser apparatus configured to output a laser beam having two or more spatial modes; a splitting optical element disposed in an optical path of the laser beam and configured to split the laser beam into multiple split beams each having the spatial modes with the number thereof reduced; and at least one dividing diffractive optical element configured to divide each of the multiple split beams into multiple divided beams at a surface of a workpiece.