Multinode O-Ring Sealing for Reusable Vacuum Chamber Seals
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Solution Overview
Problem
Traditional O-rings in semiconductor processing chambers deteriorate and outgas due to thermal and pressure cycling, leading to contamination and increased costs from frequent replacements in harsh plasma and chemical environments.
Innovation Solution
A multinode, reusable O-ring design with a closed loop body and multiple sealing nodes and antinodes that can be rotated to expose undamaged sealing surfaces, forming seals in multiple places and extending the O-ring's lifespan by reorienting it relative to the chamber components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional O-rings are used in semiconductor processing chambers, then sealing function is provided, but the O-rings deteriorate and outgas after repeated processing cycles due to thermal and pressure cycling
Solution Approach 1:
The O-ring is segmented into multiple sealing nodes (at least two distinct sealing nodes) along its circumference. Each sealing node can independently contact the sealing surfaces of chamber components. This segmentation allows the O-ring to maintain sealing function even when one node deteriorates, as other nodes remain intact and can continue to seal.
Solution Approach 2:
The patent enables recovery of the O-ring's sealing capability by rotating it to a new orientation, bringing fresh, undamaged sealing nodes into contact with the chamber components. This allows the O-ring to be reused multiple times without replacement, effectively recovering its sealing function after partial deterioration.
2Object-generated harmful factors
If O-rings are frequently replaced to maintain seal quality, then contamination is reduced, but replacement costs and downtime increase
Solution Approach 1:
The O-ring is designed to be rotatable within the chamber, allowing dynamic repositioning of the sealing nodes. This dynamic capability enables the system to extend O-ring life by rotating it to expose fresh sealing surfaces, thereby reducing the frequency of replacements and associated downtime.
Solution Approach 2:
The multi-node design ensures continuous sealing capability throughout the O-ring's service life. As long as at least one sealing node remains intact, the seal is maintained. This continuity eliminates the need for frequent interruptions to replace deteriorated O-rings.
3Ease of manufacture
If traditional single-node O-rings are used, then simple installation is achieved, but the O-rings are subject to erosion from plasma and chemical environments
Solution Approach 1:
Different portions of the O-ring (sealing nodes) are positioned to contact different chamber components or sealing surfaces. This local differentiation allows each node to experience different environmental conditions, distributing the erosive effects of plasma and chemicals across multiple locations rather than concentrating damage at a single point.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The multinode O-ring design reduces contamination, lowers replacement costs, and maintains a vacuum tight seal by rotating to expose pristine sealing surfaces, thereby enhancing the durability and efficiency of semiconductor processing.
Implementation Method 1
a resilient, closed loop body... Compressing the sealing device causes a first node to form a first seal
Implementation Method 2
sustain a vacuum tight seal between an internal chamber environment and the external environment
Data Source
AI summary
A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose nondamaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.