Multipath Probe Design for Low Loop Inductance

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Solution Overview

Problem

The inductance of test probes can affect the frequency of test signals provided to and sensed from electronic devices under test, leading to inefficiencies in testing processes.

Innovation Solution

A multipath probe design with an electrically conductive signal path and an electrically insulated secondary path, where the gap between the paths is less than 50 microns, reducing loop inductance and allowing for efficient signal delivery and return paths.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If a conventional single-path probe design is used, then the structure is simple, but the loop inductance is high which limits testing frequency

Engineering Contradiction:
Improvetesting frequencyVSAvoidprobe structure
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The probe structure is segmented into multiple independent signal paths (primary and secondary paths) that operate in parallel. Each path is electrically insulated from the others but positioned closely together, allowing the system to achieve low equivalent inductance through parallel path configuration while maintaining manageable individual path complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from a single-dimensional signal path to a multi-dimensional configuration by introducing vertically stacked conductive plates (first and second conductive plates) with signal paths running between them. This three-dimensional arrangement allows closely spaced parallel paths without increasing horizontal footprint, effectively reducing loop area and inductance

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Object-affected harmful factors

If the gap between signal path and secondary path is reduced to less than 50 microns, then loop inductance decreases, but manufacturing precision requirements increase

Engineering Contradiction:
Improveloop inductanceVSAvoidgap tolerance
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The conductive plates are designed with extensive surface areas that are electrically conductive across their faces. This equipotential surface design reduces the sensitivity of the electric field distribution to small variations in gap distance, allowing the system to achieve low inductance with relaxed manufacturing tolerances compared to point-to-point connections

Inventive Principle:
Principle #12Equipotentiality

Solution Approach 2:

Multiple conductive elements are merged into large-area conductive plates where the entire plate surface functions as a single electrical terminal. This merging approach distributes the electrical connection across a broad area, making the inductance less sensitive to local gap variations and reducing the cumulative effect of manufacturing tolerances

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves low loop inductance, enabling testing at higher frequencies and improving the accuracy and efficiency of signal transmission in test probes.

Implementation Method 1

The signal path can be through one of the probes from its first contact end to its second contact end... An electrically conductive structure can electrically connect the first contact end and the second contact end

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

The signal path can be electrically insulated from the signal path... An electrically insulating coating can cover at least part of the secondary contact

Methodology Applied
Scientific EffectElectrical insulation: Dielectric

Data Source

PatentUS10132833B2Multipath electrical probe and probe assemblies with signal paths through secondary paths between electrically conductive guide plates
Publication Date: 2018.11.20 FORMFACTOR INC
  • US10132833B2 patent drawing
  • US10132833B2 patent drawing
  • US10132833B2 patent drawing

AI summary

A multiple conduction path probe can provide an electrically conductive signal path from a first contact end to a second contact end. The probe can also include an electrically conductive secondary path and an electrically insulated gap between the signal path and the secondary path. A probe assembly can comprise multiple such probes disposed in passages in substantially parallel electrically conductive guide plates. In some configurations, the probe assembly can include one or more secondary probes disposed in passages of the conductive guide plates and electrically connected to one or both of the guide plates. Some of the probes can be electrically insulated from the guide plates and thus provide signal paths, and others of the probes can be electrically connected to the guide plates and thus provide secondary paths.