Multiphoton Exposure Beam Control for Edge Definition

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Solution Overview

Problem

Conventional multiphoton exposure systems face challenges in achieving precise edge definition and surface smoothness due to limitations in real-time control over beam characteristics, leading to uneven surfaces and reduced fidelity of the cured structures to the desired shape.

Innovation Solution

Implementing real-time power control, high-speed shuttering, dithering, and spatial modulation of the exposure beam to modify and adjust the radiation beam characteristics during scanning, allowing for precise control over voxel size and shape, thereby improving edge definition and surface smoothness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional multiphoton exposure systems are used with fixed beam characteristics, then the fabrication process is simple, but edge definition and surface smoothness are poor

Engineering Contradiction:
Improveedge definitionVSAvoidbeam control system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies dynamics by making the beam characteristics (power, position, shape) variable and adjustable in real-time during the scanning process. The radiation beam's power is dynamically modulated based on the local geometry of the structure being fabricated, allowing precise control over voxel formation at different locations to achieve smooth edges and surfaces.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes physical parameters of the radiation beam including power intensity, beam position, and beam shape during scanning. By modulating these parameters according to the desired structure geometry, the system achieves precise control over photopolymerization extent, resulting in improved edge definition and surface smoothness.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If the radiation beam power is kept constant during scanning, then the control system is simple, but voxel size and shape become inconsistent leading to rough surfaces

Engineering Contradiction:
Improvesurface smoothnessVSAvoidpower control mechanism
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent implements feedback control by continuously monitoring the radiation beam power and adjusting it in real-time to maintain consistent voxel characteristics. The system uses feedback signals to modulate the beam power according to the scanning position and local geometric requirements, ensuring uniform surface quality throughout the fabricated structure.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent applies periodic modulation of the radiation beam power during scanning. By using pulsed or periodically varied power delivery synchronized with the scanning motion, the system maintains consistent energy deposition per voxel while adapting to changes in scan velocity or positioning, thereby achieving smooth surfaces.

Inventive Principle:
Principle #19Periodic action

3Productivity

If high scanning velocity is used to reduce fabrication time, then productivity increases, but edge definition deteriorates due to insufficient power delivery

Engineering Contradiction:
Improvefabrication speedVSAvoidedge fidelity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent uses dynamic power adjustment that correlates beam intensity with scanning velocity. When the scan velocity increases, the system automatically increases beam power to compensate for reduced exposure time, maintaining consistent photopolymerization extent and edge fidelity across varying scan speeds, thereby enabling high-speed fabrication without sacrificing precision.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent applies preliminary anti-action by pre-compensating for the effects of high scanning velocity through anticipatory power modulation. The system calculates required power adjustments based on planned scan path and velocity profile, applying compensatory power increases before entering high-speed segments to ensure adequate curing occurs even at elevated speeds.

Inventive Principle:
Principle #9Preliminary anti-action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed methods enhance edge definition and surface smoothness by maintaining consistent voxel size and shape, reducing surface roughness, and increasing the fidelity of the cured structures to the desired design, while also potentially reducing the time required for structure fabrication.

Implementation Method 1

A non-linear interaction process within the resin initiates cure of the resin near a focus of the laser beam, where two photons of the NIR radiation are absorbed substantially simultaneously

Methodology Applied
Scientific EffectMultiphoton absorption: Absorption (EM radiation)

Implementation Method 2

The curing of the resin may be referred to as 'photopolymerization,' and the process may be referred to as a 'two-photon photopolymerization' process

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentEP2232531B1Method for making structures with improved edge definition
Publication Date: 2018.09.19 3M INNOVATIVE PROPERTIES CO
  • EP2232531B1 patent drawingFigure 1~3
  • EP2232531B1 patent drawingFigure 4A~5
  • EP2232531B1 patent drawingFigure 6~7

AI summary

A method includes scanning a radiation beam with respect to a multiphoton curable photoreactive composition. The radiation beam includes a power sufficient to at least partially cure a volume of the multiphoton curable photoreactive composition. The method further includes modifying a characteristic of the radiation beam as the radiation beam is scanned.