Multiphoton Lithography Beam Control for High-Throughput 3D Printing

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Solution Overview

Problem

Existing lithography-based additive manufacturing methods face low throughput due to small focus point volumes, limiting industrial use despite high structural resolution, and require complex equipment for independent beam control, restricting the production of diverse components.

Innovation Solution

Employ a spatial light modulator with electronically controllable pixels to control multiple beams simultaneously, allowing independent selection of volume elements for solidification, combined with a common deflection unit for raster scanning, and adjust radiation intensity for grayscale and height control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a focused laser beam is used for multiphoton absorption to achieve high structural resolution, then volume elements with minimum structure sizes of up to 50 nm×50 nm×50 nm can be achieved, but the throughput is very low because more than 10^9 points have to be exposed for a volume of 1 mm³

Engineering Contradiction:
Improvestructural resolutionVSAvoidthroughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent divides the single laser beam into multiple separate beams using beam splitters, with each beam independently focused onto the material. This segmentation allows parallel processing of multiple volume elements simultaneously, increasing throughput while maintaining the high resolution capability of each individual focused beam.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a temporal dimension by rapidly switching between different beam paths using a spatial light modulator. The system can dynamically route different beams to different spatial locations at different times, enabling complex three-dimensional structures to be built through time-resolved parallel processing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If the beam is split into multiple beams to increase throughput, then parallel solidification of volume elements is enabled, but complex equipment is required for independent beam control

Engineering Contradiction:
ImprovethroughputVSAvoidequipment complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent employs a spatial light modulator that can dynamically control multiple beam paths through a single device. This multi-functional component replaces what would traditionally require separate control mechanisms for each beam, reducing overall system complexity while maintaining the ability to independently control multiple beams for parallel processing.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If the focus point volume is varied to increase throughput, then high resolutions are possible with small focus point volume and high writing speed with large focus point volume, but the equipment complexity increases

Engineering Contradiction:
Improvewriting speedVSAvoidequipment complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent uses a spatial light modulator that can dynamically adjust the spatial distribution and intensity of multiple beams in real-time. This dynamic control allows the system to adapt the effective focus point volume and beam configuration without requiring physical reconfiguration of optical components, thereby increasing writing speed while avoiding the complexity of mechanical adjustment systems.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly increases writing speed and throughput while maintaining high structural resolution, enabling efficient production of complex components with reduced equipment complexity.

Implementation Method 1

a spatial light modulator with a plurality of electronically controllable pixels which can be scanned by the plurality of beams and which can be switched individually between at least one on-state and an off-state

Methodology Applied
Scientific EffectElectro-optic modulation: Electro-Optic Effects

Implementation Method 2

the focal points are displaced in the beam direction by means of a deflection unit arranged upstream of the optical imaging unit, whereby volume elements of the material located at the respective focal points are successively solidified by means of multiphoton absorption

Methodology Applied
Scientific EffectMultiphoton absorption: Absorption (EM radiation)

Implementation Method 3

the focal points are displaced in the beam direction by means of a deflection unit arranged upstream of the optical imaging unit

Methodology Applied
Scientific EffectBeam deflection: Reflection

Data Source

PatentUS20260027771A1Method and device for lithography-based additive manufacturing of a three-dimensional component
Publication Date: 2026.01.29 UPNANO GMBH
  • US20260027771A1 patent drawing
  • US20260027771A1 patent drawing
  • US20260027771A1 patent drawing

AI summary

Method for lithography-based additive manufacturing of a three-dimensional component. A beam splitter splits a beam into a plurality of beams that are focused on focal points within a material by an optical imaging unit. The focal points are adjusted by means of a deflection unit disposed upstream of the optical imaging unit in the beam direction, whereby a volume element of the material is solidified by means of multiphoton absorption successively at the focal point of each beam, a spatial light modulator having a plurality of electronically controllable pixels is provided, which pixels are scanned by the plurality of beams and are switched individually between at least one on state and one off state as a function of the geometry of the component that is to be realized, with the result that the associated beam is guided to the imaging unit only in the at least one on-state.