Multiple Beam Reflector Splits Laser Paths for Simultaneous Inspection
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Solution Overview
Problem
Conventional laser optical systems with a single optical path face significant measurement errors due to environmental changes like temperature and vibration, making it difficult to inspect multiple specimens under different conditions without altering the inspection environment.
Innovation Solution
A multiple beam path laser optical system using a multiple beam reflector that splits a laser beam into multiple optical paths, allowing simultaneous non-destructive inspection of multiple specimens by generating a plurality of optical paths, with a light source, multiple beam reflectors, main beam splitters, transducers, and a control part to analyze interference patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single optical path laser system is used, then the device complexity is low, but measurement precision deteriorates due to environmental changes affecting different specimens differently
Solution Approach 1:
The patent divides a single laser beam into multiple separate optical paths using beam splitters and mirrors, allowing each specimen to be illuminated by its own dedicated laser path. This segmentation enables independent control and measurement for each specimen, eliminating cross-interference and improving measurement precision while maintaining manageable system complexity through modular optical components.
2Productivity
If specimens are inspected sequentially in a single optical path, then the device complexity is low, but productivity deteriorates due to inability to inspect multiple specimens simultaneously
Solution Approach 1:
The optical system is segmented into multiple independent measurement channels, each capable of inspecting a specimen simultaneously. This allows parallel processing of multiple specimens without requiring complex coordination mechanisms, thereby improving productivity while keeping the overall device architecture relatively simple and maintainable.
Solution Approach 2:
The patent creates a multi-functional optical system where a single laser source serves multiple specimens through beam splitting. Each optical path functions independently but shares common components like the laser source and control system, achieving universality that improves productivity without proportionally increasing device complexity.
3Measurement precision
If environmental conditions change during inspection, then the ease of operation is maintained, but measurement precision deteriorates due to varying laser intensity and polarization
Solution Approach 1:
By segmenting the optical path for each specimen, environmental variations affect each path independently but consistently, allowing for better control and compensation. Each segmented path can be optimized and stabilized separately, maintaining measurement precision without requiring complex environmental control mechanisms that would reduce ease of operation.
Solution Approach 2:
The patent employs reference beams and interference patterns that are established before measurement to compensate for environmental variations. By setting up the optical paths and reference standards in advance, the system cushions against future environmental changes, maintaining measurement precision while keeping the operation simple and straightforward.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and consistent inspection of multiple specimens under the same environmental conditions, reducing measurement errors and increasing inspection reliability by maintaining consistent laser beam intensity and polarization across specimens.
Implementation Method 1
a front glass to generate a first reflected laser beam by reflecting the laser beam incident from the light source part
Implementation Method 2
a control part to analyze an interference pattern of a laser beam reflected from the specimen and recombined in the main beam splitter
Data Source
AI summary
A multiple beam path laser optical system using a multiple beam reflector. The multiple beam path laser optical system includes a light source part to generate a laser beam to be irradiated to a specimen, the multiple beam reflector to split a laser beam incident thereto from the light source part and to provide a plurality of optical paths, a main beam splitter to irradiate the laser beam split by the multiple beam reflector to the specimen, a transducer to excite the specimen for signal detection of the laser beam irradiated to the specimen, and a control part to analyze an interference pattern of a laser beam reflected from the specimen and recombined in the main beam splitter.


