Multiple Emitter Electron Source for Lifetime and Beam Control
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Solution Overview
Problem
Charged particle systems, such as electron microscopes and focused ion beam systems, face limitations in source lifetime and beam homogeneity due to the finite lifetime of single emitters, which affects the precision and efficiency of beam alignment and processing.
Innovation Solution
A multiple emitter electron beam source is configured to operate in various emission modes, allowing for extended source lifetimes and high beam currents by using multiple independently addressable emitters, which can be activated sequentially or simultaneously, enabling improved control over emission parameters like brightness and angular intensity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If a single emitter is used in the charged particle source, then the device complexity is low, but the source lifetime is limited due to emitter degradation
Solution Approach 1:
The charged particle source is divided into multiple independent emitters arranged in an array, where each emitter can be independently controlled and selected. This segmentation allows the system to switch between multiple emitters, extending the overall source lifetime by distributing usage across multiple components rather than relying on a single emitter that degrades over time.
2Duration of action of stationary object
If multiple emitters are used in the charged particle source, then the source lifetime is extended, but the device complexity increases
Solution Approach 1:
The multiple emitters in the array are designed to be functionally equivalent and interchangeable, with each emitter capable of performing the same charged particle generation function. This universality allows the system to maintain simplicity in operation by treating all emitters as identical units, reducing the complexity burden despite having multiple components.
3Quantity of substance
If a single emitter is used, then the device complexity is low, but the beam current is limited
Solution Approach 1:
Multiple emitters are combined in an array configuration where their individual beam currents can be summed to achieve higher total beam current. The emitters work together in parallel, merging their contributions to produce a composite beam with greater intensity than any single emitter could provide alone.
4Quantity of substance
If multiple emitters are activated simultaneously, then the beam current increases, but the beam homogeneity deteriorates
Solution Approach 1:
Different regions of the emitter array can be selectively activated based on the required beam characteristics. By controlling which specific emitters are turned on, the system can optimize for either high beam current (activating multiple emitters) or high beam homogeneity (activating fewer, strategically selected emitters), allowing local optimization of beam quality.
5Stability of the object's composition
If sequential emitter activation is used, then the beam homogeneity is maintained, but the processing speed decreases
Solution Approach 1:
The system dynamically switches between different emitter activation modes depending on the operational requirements. For applications requiring high beam homogeneity, sequential activation is used; for applications requiring rapid processing, multiple emitters are activated simultaneously. This dynamic adaptability allows the system to optimize performance for different task requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly extends source lifetime, enhances beam current capabilities, and improves beam alignment and processing efficiency by allowing for high brightness and high angular intensity modes, thereby optimizing the performance of charged particle systems.
Implementation Method 1
a first emitter (101) of a multiplicity of independently addressable emitters (101-112) in the source (202) is activated to emit a charged particle beam
Data Source
Figure 1~2
Figure 3~4
Figure 5(A)~5(D)
AI summary
A charged particle source (202) for a focused particle beam system (200) such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), scanning electron microscope (SEM), or focused ion beam (FIB) system is disclosed. The source employs a multiplicity of independently-addressable emitters within a small region which can be centered on the axis of the charged particle system. All of the emitters may be individually controlled to enable emission from one or more tips simultaneously. A mode with only one emitter activated corresponds to high brightness, while modes with multiple emitters simultaneously activated provides high angular intensities with lower brightness. Source lifetimes can be extended through sequential use of single emitters. A combined mechanical and electrical alignment procedure for all emitters is described.