Multiple-Patterning-Aware Routing Engine Grid Segmentation
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Solution Overview
Problem
Conventional design rule checking (DRC) processes for electronic designs at advanced technology nodes, such as 32 nm and beyond, are inefficient due to the global and directional nature of trim mask rules, leading to long search times and inability to accommodate multiple-patterning aware correct-by-construction routing solutions.
Innovation Solution
Implementing multiple-patterning aware correct-by-construction layout processing using a routing engine that defines and utilizes sets of grids to route interconnects, allowing for efficient compliance with trim mask rules by transforming the problem into a local routing issue and representing interconnects at a higher abstraction level with extra bits for wrong-way tracks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional design rule checking is used for trim mask rules, then design rule checking can be performed, but search time increases proportionally to log(n) and execution takes several hours or days
Solution Approach 1:
The patent segments the continuous layout space into discrete grid cells, transforming the problem from checking all shapes globally to checking grid compliance locally. This segmentation reduces the search complexity from log(n) to constant time by dividing the design space into manageable units that can be processed independently.
Solution Approach 2:
The patent performs preliminary gridding of the layout space before design rule checking. By pre-establishing the grid structure and determining which grid cells are affected by each shape, the system avoids repeated global searches during DRC execution, thereby reducing execution time from hours/days to constant time.
2Manufacturing precision
If multiple core masks are used for multiple patterning, then half-pitch sizes can be achieved, but alignment or overlay issues arise between masks
Solution Approach 1:
The patent introduces trim masks as intermediary elements between the core mask and the final pattern. The trim masks serve as mediators that refine the pattern without requiring precise alignment with the core mask, thereby achieving half-pitch sizes while avoiding alignment issues between multiple core masks.
Solution Approach 2:
The patent performs preliminary determination of trim mask rules and their integration with layout design rules before physical design implementation. This advance planning allows the system to accommodate trim mask requirements in the routing and layout processes, ensuring compliance without requiring complex alignment procedures.
3Reliability
If trim mask rules are merged with metal layout design rules, then comprehensive rule coverage is achieved, but physical design implementation complexity increases significantly
Solution Approach 1:
The patent applies local quality by treating trim mask rules and metal layout rules differently in the implementation process. Instead of uniformly applying all rules globally, the system identifies and applies specific rules to specific regions or features, thereby reducing implementation complexity while maintaining comprehensive rule coverage.
Solution Approach 2:
The patent changes the parameter representation by using grid-based coordinates and abstraction levels to represent layout features. This parameter transformation simplifies the handling of complex trim mask rules by converting geometric constraints into discrete grid-based conditions that are easier to process and enforce during physical design implementation.
4Ease of operation
If conventional physical design approaches are used, then routing can be performed, but the process depends on total number of shapes and takes longer for larger designs
Solution Approach 1:
The patent segments the routing problem by representing interconnects at a higher abstraction level using grid cells rather than detailed shape geometries. This segmentation reduces the computational burden by processing grid-based representations instead of full shape data, thereby decreasing routing execution time for large designs while maintaining routing capability.
Solution Approach 2:
The patent transitions from two-dimensional continuous shape representation to a discrete grid-based representation, adding an abstraction dimension. This dimensional change allows routing algorithms to operate on simplified grid coordinates rather than complex shape geometries, significantly reducing processing time for large-scale designs.
Data Source
AI summary
Disclosed are methods, systems, and articles of manufactures for implementing correct-by-construction physical designs with multiple-patterning-awareness by identifying a first set of grids for a layer based at least in part upon characteristics of other layer(s), identifying a set of tracks for the layer to implement the physical design for the layer, and implementing a shape in the physical design by at least terminating an end of the shape at a grid of the identified first set of grids. The end of the shape may be extended or contracted from its as-design location to the grid. The physical design thus implemented is correct-by-construction and is free of violations of one or more directional design rules.