Multiple Pin Probe Parallel Measurement for In-Plane Tunneling
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Solution Overview
Problem
Current in-plane tunneling measurement processes using multiple pin probes are inefficient and prone to inaccuracies due to their repetitive nature and the time required for multiple measurement steps, which can lead to pin position changes and measurement variations.
Innovation Solution
A system and method utilizing a multiple pin probe with N-number of pins, where N is greater than four, and a control circuit to select two current-carrying pins and multiple voltage-metering pins, injecting current and simultaneously measuring voltage signals across these pins to calculate a simulated voltage distribution curve, thereby determining junction parameters and improving measurement efficiency and accuracy by enabling parallel measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple measurement steps are performed sequentially using conventional current in-plane tunneling, then measurement completeness is achieved, but measurement time increases and pin position stability deteriorates
Solution Approach 1:
The measurement system segments the measurement function across multiple voltage-metering pins, allowing simultaneous voltage measurements at different locations while current flows through two current-carrying pins. This parallel measurement approach completes all necessary measurements in a single step rather than requiring multiple sequential steps, thereby reducing measurement time while maintaining accuracy.
Solution Approach 2:
The system maintains continuous measurement action by simultaneously injecting current through current-carrying pins and measuring voltage at multiple voltage-metering pins in parallel. This eliminates the idle time between sequential measurement steps and ensures that all measurements are taken under identical pin position conditions, improving both speed and accuracy.
2Measurement precision
If multiple measurement steps are performed sequentially, then complete measurement data is obtained, but pin position changes occur leading to measurement variations
Solution Approach 1:
The measurement function is segmented across multiple voltage-metering pins that simultaneously measure voltage at different locations during a single current injection event. This parallel segmentation allows complete measurement data to be obtained without sequential steps, eliminating pin position drift between steps and ensuring all measurements reference the same pin positions.
Solution Approach 2:
The system establishes all electrical connections and pin positions once before initiating the measurement, then simultaneously performs all voltage measurements in parallel. This preliminary establishment of measurement geometry prevents pin position changes during the measurement process, as all measurements are completed in a single step before any position drift can occur.
3Productivity
If conventional sequential measurement steps are used, then measurement completeness is achieved, but measurement efficiency decreases
Solution Approach 1:
The measurement system uses multiple voltage-metering pins to segment the voltage measurement function, allowing simultaneous parallel measurements. This segmentation enables all necessary voltage data to be collected in a single measurement step rather than through multiple sequential steps, dramatically improving measurement efficiency and productivity.
Solution Approach 2:
The multiple pin probe structure serves multiple functions simultaneously: two pins function as current-carrying electrodes while multiple other pins function as voltage-metering electrodes. This multi-functionality allows the system to perform complete measurements in parallel, improving efficiency without proportionally increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces measurement time, minimizes errors caused by pin position changes, and prolongs the probe's lifetime by allowing simultaneous multi-point measurements, enhancing accuracy and reducing contact time.
Implementation Method 1
inject a current through the two current-carrying pins
Implementation Method 2
simultaneously measure voltage signals through the more than two voltage-metering pins
Data Source
AI summary
Multiple pin probes and methods for controlling such multiple pin probes to support parallel measurements are disclosed. The method may include: establishing electrical contact between a multiple pin probe and a subject of measurement; selecting two pins out of a plurality of pins included in the multiple pin probe as current-carrying pins; selecting more than two additional pins out of the plurality of pins included in the multiple pin probe as voltage-metering pins; injecting a current through the current-carrying pins; simultaneously measuring voltage signals through the voltage-metering pins; calculating a simulated voltage distribution curve at least partially based on the voltage signals simultaneously measured through the voltage-metering pins; and determining one or more processor monitor parameters of the subject of measurement at least partially based on the simulated voltage distribution curve.