Multiplexed Hologram Exposure with Central Beam Routing

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Solution Overview

Problem

Existing hologram generation systems face inefficiencies due to limited productivity and high costs associated with laser utilization, vibration dissipation times, and increased system footprint, particularly when generating high-quality holograms on multiple devices.

Innovation Solution

A multiplex hologram generating system with a central mirror and beam splitters in each process chamber, along with rotatable mirrors in three axes, to direct and split laser beams efficiently across multiple devices, enhancing beam uniformity and reducing the need for additional lasers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a single laser is used to write holograms with multiple adjustments of linear and rotary axes, then system cost is reduced, but productivity is limited due to vibration dissipation time and low laser utilization

Engineering Contradiction:
Improvehologram writing throughputVSAvoidvibration dissipation time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The system segments the single laser beam into multiple beams using beam splitters and diffraction gratings, allowing simultaneous exposure of multiple devices. This divides the work load across parallel processing channels, eliminating the sequential bottleneck and reducing total production time without requiring multiple lasers.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The single laser source performs multiple functions by generating beams for multiple devices simultaneously through optical segmentation. The laser serves as a universal source that can address multiple process chambers at once, increasing utilization efficiency and eliminating idle time between exposures.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Productivity

If additional lasers are used to increase throughput, then productivity is improved, but system cost and footprint increase

Engineering Contradiction:
Improvehologram writing throughputVSAvoidsystem footprint and cost
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

Instead of adding more laser sources, the system segments the optical path of a single laser using beam splitters and diffraction gratings. This creates multiple independent beam paths that can simultaneously process multiple devices, achieving the throughput of multiple lasers while maintaining a single laser source and reducing system complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Beam splitters and diffraction gratings act as intermediary optical elements that divide the single laser beam into multiple paths. These intermediaries enable one laser to serve multiple devices simultaneously, replacing the need for multiple lasers and reducing system cost and footprint.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If multiple lasers are deployed to process multiple devices simultaneously, then productivity increases, but laser utilization efficiency decreases

Engineering Contradiction:
ImprovethroughputVSAvoidlaser utilization efficiency
Core Design Contradiction:
ProductivityVSUse of energy by moving object

Solution Approach 1:

The system segments a single high-utilization laser beam into multiple paths using optical splitters and gratings, allowing simultaneous processing of multiple devices. This maintains continuous operation of the single laser source, maximizing its utilization efficiency while achieving the throughput of multiple lasers.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system merges the functionality of multiple lasers into a single laser source by combining optical paths through beam splitters and diffraction gratings. This consolidation maintains continuous laser operation across all process chambers, improving overall utilization efficiency while achieving high throughput.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system increases hologram productivity and throughput while maintaining beam quality, reducing costs and system size by optimizing beam distribution and interference patterns.

Implementation Method 1

A central mirror is centrally disposed among the process chambers and is rotatable to reflect the beam to each of the process chambers for processing

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

A beam splitter is disposed within each of the process chambers and each beam splitter is used to receive beams from the central mirror and emit a first beam in a first direction and a second beam in a second direction

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 3

A first mirror directs the first beam to a device and a second mirror directs the second beam to the device. Each of the first mirror and second mirror is rotatable in three axes

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

Generating holograms involves directing two interfering beams to form a pattern on a device

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentUS12566335B2Multiplexed hologram interference exposure system
Publication Date: 2026.03.03 APPLIED MATERIALS INC
  • US12566335B2 patent drawing
  • US12566335B2 patent drawing
  • US12566335B2 patent drawing

AI summary

The present disclosure provides an apparatus and method for fabricating optical devices. The apparatus includes a support table having process chambers and a laser used to direct a beam along a propagation path to each of the process chambers. A central mirror is centrally disposed among the process chambers and is rotatable to reflect the beam to each of the process chambers for processing. A beam splitter is disposed within each of process chambers, each beam splitter is used to receive beams from the central mirror and emits a first beam in a first direction and a second beam in a second direction. A first mirror directs the first beam to a device and a second mirror directs the second beam to the device. Each of the first and second mirror is rotatable in at least three axes.