Multipoint Gas Sampling Assemblies for Reduced Detection Delay
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Solution Overview
Problem
Conventional gas detection systems in semiconductor manufacturing take a long time to sample from a target area to a detector due to the long distance between them, leading to delayed detection and inefficient monitoring of airborne molecular contamination.
Innovation Solution
A gas detection system with multiple sampling assemblies, each equipped with an inlet channel, pump, and switchable valve, controlled by a central unit, allowing continuous multipoint detection by alternating sampling and pre-sampling states to rapidly guide gases into a detector.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional monitoring system uses a single sampling point with long distance to detector, then the system structure is simple, but the detection time is long and detection efficiency is low
Solution Approach 1:
The patent divides the single sampling system into multiple sampling assemblies (first sampling assembly, second sampling assembly, etc.), each with its own inlet channel, pump, and valve. This segmentation allows parallel sampling from multiple locations, significantly reducing total detection time while maintaining manageable system complexity through modular design.
Solution Approach 2:
The patent implements pre-sampling functionality where sampling assemblies can collect gas samples in advance into sampling bags before formal detection. This preliminary action allows the system to prepare samples during idle periods, reducing actual detection time and improving overall productivity without requiring immediate long-distance transport.
2Measurement precision
If multiple sampling assemblies are used for continuous multipoint detection, then detection efficiency and accuracy are improved, but system complexity increases
Solution Approach 1:
The patent merges multiple sampling assemblies into a unified system controlled by a single control unit. The control unit coordinates first valves, second valves, and pumps across all sampling assemblies, allowing them to operate in coordinated sequences (sampling state, pre-sampling state, standby state). This merging approach enables continuous multipoint detection with improved accuracy while managing complexity through centralized control.
Solution Approach 2:
The patent designs sampling assemblies with universal components that can perform multiple functions. For example, each sampling assembly can alternately perform sampling, pre-sampling, and standby functions, and the control unit manages all assemblies using similar control logic. This multi-functionality reduces the need for specialized components for each function, thereby improving detection accuracy across multiple points while limiting the increase in overall system complexity.
3Area of stationary object
If sampling assemblies are positioned far from detector, then sampling coverage area is large, but sampling time increases and detection is delayed
Solution Approach 1:
The patent implements pre-sampling where gas is collected into sampling bags at distant locations before being transported to the detector. This preliminary action allows the system to capture samples across a large coverage area in advance, then quickly analyze them sequentially, thereby maintaining large sampling coverage while significantly reducing the time loss associated with long-distance transport during formal detection.
Solution Approach 2:
By dividing the sampling system into multiple geographically distributed sampling assemblies, each covering a specific local area, the system achieves comprehensive large-area coverage. Each assembly operates semi-independently with its own pump and valve system, allowing parallel sample collection from distant locations, which reduces the time penalty of distance through concurrent operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous, efficient multipoint detection by sequentially sampling from multiple areas, reducing sampling time and improving detection efficiency and accuracy.
Implementation Method 1
a first pump (12) communicated between the at least one inlet channel (11) and the first valve (13)
Data Source
AI summary
A gas detection system includes a plurality of sampling assemblies, at least one detector and a control unit. The plurality of sampling assemblies respectively include at least one inlet channel, a first pump and a first valve. The first pump is communicated between the at least one inlet channel and the first valve, and the first valve is switchable between a sampling state and a pre-sampling state. The at least one detector is selectively communicated with the first valve of one of the plurality of sampling assemblies. The control unit is communicative with the plurality of sampling assemblies and controls said first valves of the plurality of sampling assemblies. When the first valve of one of the plurality of sampling assemblies is in the sampling state, the first valve of another one of the plurality of sampling assemblies is in the pre-sampling state.