Multipole Lens Coil Merging for Noise Reduction
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Solution Overview
Problem
Conventional multipole lenses require a large number of power supplies and coils to generate X- and Y-components of quadrupole and octopole fields, leading to complex wiring and increased noise susceptibility.
Innovation Solution
A multipole lens design with a minimum of four power supplies and 16 coils of the same shape and number of turns, where coils are connected in series to produce the required magnetic fields, allowing for the generation of X- and Y-components of quadrupole and octopole fields while minimizing noise effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional multipole lens designs use separate coils for each magnetic polepiece to generate quadrupole and octopole fields, then the required magnetic field components can be achieved, but the number of coils and power supplies increases significantly, leading to complex wiring and increased noise susceptibility
Solution Approach 1:
The patent combines multiple coil functions into a single coil structure. The coil generates a magnetic field that simultaneously provides both quadrupole and octopole field components through strategic placement of magnetic polepieces with different polarities around the coil. This eliminates the need for separate coils for each field component, reducing the number of power supplies and wiring complexity while maintaining field generation capability
Solution Approach 2:
The single coil structure serves multiple functions by generating a magnetic field that contains both quadrupole and octopole field components. By adjusting the currents in the shared coil and configuring the magnetic polepieces, the system can independently control X and Y components of both quadrupole and octopole fields, making the coil a multi-functional element
2Ease of operation
If multiple independent power supplies are used to control each coil independently, then precise control of magnetic field components is achieved, but the wiring becomes more complex and the system becomes more susceptible to noise
Solution Approach 1:
The patent merges multiple power supply functions into a single shared power supply. By using one coil that generates both quadrupole and octopole field components, the system requires only one power supply instead of multiple independent ones. The magnetic field components are controlled by adjusting the current magnitude and direction in the shared coil, maintaining control precision while reducing wiring complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design simplifies the structure, reduces the number of coils and power supplies, and effectively cancels out deflecting fields, resulting in a more robust and efficient generation of multipole fields with reduced noise interference.
Implementation Method 1
The multipole lens is configured including twelve magnetic polepieces, twelve coils, twelve power supplies, and a yoke. Each of the coils with the same shape and with the same number of turns is mounted to a respective one of the magnetic polepieces. Electric currents are supplied to these coils from the independent power supplies, respectively.
Implementation Method 2
Aberration correctors operate to correct aberrations by applying a magnetic field, an electric field, or a superimposition of these fields to a passage for a charged particle beam (such as an electron beam) by the use of multipole lenses.
Implementation Method 3
In some cases, a low-order multipole field is superimposed on an octopole field to reduce the effects of axial deviation. The magnetomotive forces applied to the magnetic polepieces are determined by the numbers of turns of the coils wound on the magnetic polepieces and by currents flowing through the coils.
Data Source
AI summary
A multipole lens is provided which is for use in electron microscopy and which is simple in structure but capable of producing X- and Y-components of a quadrupole field and X- and Y-components of an octopole field. The multipole lens (100) comprises: first through twelfth polar elements (10-1 to 10-12); first through sixteenth coils (20-1 to 20-16); a first power supply (30-1) for supplying currents to the coils (20-1, 20-4, 20-9, 20-12); a second power supply (30-2) for supplying currents to the coils (20-3, 20-5, 20-11, 20-13); a third power supply (30-3) for supplying excitation currents to the coils (20-6, 20-8, 20-14, 20-16); and a fourth power supply (30-4) for supplying excitation currents to the coils (20-2, 20-7, 20-10, 20-15). The coils (20-1, 20-3, 20-6, 20-7, 20-9, 20-11, 20-14, 20-15) produce magnetic fields in a first direction. The coils (20-2, 20-4, 20-5, 20-8, 20-10, 20-12, 20-13, 20-16) produce magnetic fields in a direction opposite to the first direction.