Multistage Multipole Lens Assembly With Insulating Pillar Notches
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Solution Overview
Problem
Existing methods for manufacturing multistage-connected multipole lenses for charged particle beam devices face challenges in achieving accurate assembly and electrical insulation, leading to parasitic aberrations and reduced mass productivity due to the need for precise brazing and potential deformation issues.
Innovation Solution
A multistage-connected multipole design featuring poles with notches and insulating pillars joined via a joining material, allowing for accurate machining and assembly without requiring precise brazing, and ensuring electrical insulation between poles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If poles are joined together by brazing an insulation material, then electrical insulation between poles is achieved, but assembly tolerance cannot be avoided and manufacturing accuracy deteriorates
Solution Approach 1:
The patent merges the insulation material and pole into a single integrally formed component. The insulation material is embedded within the pole structure during manufacturing, eliminating the need for separate brazing operations. This integration ensures both electrical insulation and precise positioning without assembly tolerance issues.
Solution Approach 2:
The insulation material is prepared and positioned in advance during the pole manufacturing process, before final assembly. The poles are pre-formed with embedded insulation, so that when assembled, the insulation is already in its correct position and orientation, eliminating the need for post-assembly adjustment.
2Manufacturing precision
If poles are machined one by one before brazing, then individual pole accuracy is achieved, but mass productivity is reduced due to complex assembly processes
Solution Approach 1:
Multiple poles are manufactured as integrally formed members in a single manufacturing process. The insulation material and multiple pole sections are formed together as one piece, eliminating the need for separate machining and assembly operations for each pole, thereby significantly improving mass productivity.
Solution Approach 2:
The integrally formed member is designed with distinct pole sections that are separated by embedded insulation material. This segmentation allows the single manufactured piece to function as multiple independent poles while maintaining the benefits of integrated manufacturing.
3Device complexity
If two integrally formed members are assembled together to form a dodecapole lens, then the number of parts is reduced, but assembly tolerance between members causes parasitic aberration
Solution Approach 1:
The patent merges multiple pole sections and insulation materials into a single integrally formed member. This eliminates the need to assemble multiple separate members, thereby reducing the number of parts while simultaneously eliminating assembly tolerance issues that would cause parasitic aberration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the fabrication of multistage-connected multipole lenses with improved accuracy and mass productivity, reducing parasitic aberrations and deformation, while maintaining electrical insulation, thus enhancing the performance of charged particle beam devices.
Implementation Method 1
a pillar formed of an insulator disposed between the poles; The poles and the pillars are joined with each other in the notch via a joining material
Data Source
AI summary
Provided are a multistage-connected multipole and a charged particle beam device that can be produced with precision in machining without requiring precision in brazing between a pole and an insulation material. This multi-stage connected multipole 100 comprises: a plurality of poles Q1-Q4 that are arranged along the optical-axis direction of a charged particle beam, and that have cutouts Non surfaces facing each other; and braces P1-P3 that are arranged between the plurality of poles Q1-Q4 and are made of an insulator. The poles Q1-Q4 and the braces P1-P3 are joined by fitting the braces P1-P3 into the cutouts N and applying brazing so as to be interposed by a bonding material.