Multi-Rate Ring Buffer Data Management for Semiconductor Tools
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The capacity of the ring buffer in control devices for semiconductor manufacturing apparatuses needs to be increased to accommodate high sampling rates of control and measured data, which is not efficiently addressed by existing technologies.
Innovation Solution
Implementing a data management method that utilizes multiple ring buffers with different temporal granularities for data storage, where high-speed sampling data is stored in one buffer and low-speed or event data in others, with time information correction and association for uniform storage in a database.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the sampling rate of control data and measured data is increased to achieve accurate management of operating conditions, then the data accuracy and temporal resolution are improved, but the ring buffer capacity requirement increases
Solution Approach 1:
The patent divides the single ring buffer into multiple ring buffers (first ring buffer and second ring buffer) with different capacities and sampling rates. The first ring buffer stores data at a first sampling rate, while the second ring buffer stores data at a second sampling rate. This segmentation allows the system to maintain high sampling accuracy for critical data while using lower sampling rates for less critical data, thereby reducing the total buffer capacity requirement while preserving measurement precision for important parameters.
2Quantity of substance
If multiple ring buffers with different sampling rates are used to reduce buffer capacity, then the ring buffer capacity is reduced, but the data synchronization and time alignment become more complex
Solution Approach 1:
The patent introduces a data management device that acts as an intermediary between the control device (with multiple ring buffers) and the database. This intermediary device receives data from multiple ring buffers with different sampling rates, performs time synchronization and alignment, and stores the synchronized data in the database. By placing this intermediary layer, the system reduces buffer capacity requirements while managing the complexity of multi-rate data synchronization externally, rather than within the control device itself.
3Reliability
If all data is stored at the highest sampling rate to maintain data integrity, then the data completeness is improved, but the storage efficiency and buffer utilization deteriorate
Solution Approach 1:
The patent applies local quality by assigning different sampling rates to different data types based on their specific requirements. Critical operating parameters that require high temporal resolution are stored in the first ring buffer at a higher sampling rate, while less critical parameters are stored in the second ring buffer at a lower sampling rate. This localized optimization of sampling rates ensures data integrity for important parameters while improving storage efficiency overall, avoiding the waste of storing all data at the maximum sampling rate.
Data Source
AI summary
Conventionally, in order to hold data with a high sampling rate in a control device, it has been necessary to increase the capacity of ring buffers. A data management method for a semiconductor manufacturing apparatus includes acquiring, by a control device, data related to operation of the semiconductor manufacturing apparatus, identifying, by the control device, first data and second data of the acquired data, writing, by the control device, the first data to a first ring buffer at first temporal granularity and the second data to a second ring buffer at second temporal granularity coarser than the first temporal granularity, and extracting, by a data management device, the first and second data from the first ring buffer and the second ring buffer respectively and storing the first and second data in a database.