Multistage Probe Device Vertical Segmentation Wear Resistance
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Solution Overview
Problem
Existing probe devices for semiconductor testing face issues with limited contact area, wear resistance, and conductivity due to the stacking of probe and coupling portions made from different materials, leading to potential separation under applied loads and reduced efficiency and lifespan.
Innovation Solution
A probe device with a multistage structure manufactured using MEMS, where the second body portion, first body portion, middle portion, and contact portion are stacked with the contact portion having high rigidity and wear resistance, and the middle portion having superior conductivity, with inclined surfaces for enhanced contact and load distribution, preventing cross-sectional separation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the probe portion is stacked horizontally with the coupling portion made of different materials, then the probe portion can be formed with high rigidity and the coupling portion with high conductivity, but the probe portion and coupling portion are difficult to exhibit unique electrical and mechanical characteristics and may separate under load
Solution Approach 1:
The probe device is divided into distinct segments: a probe portion (first protrusion) made of a material with high rigidity and wear resistance, and a coupling portion (second protrusion) made of a material with high conductivity. These segments are vertically stacked and integrally formed, allowing each to exhibit its unique characteristics while maintaining structural integrity through the vertical integration rather than horizontal stacking.
2Ease of manufacture
If the contact portion has a plate shape, then the structure is simple, but the contact area with the terminal is limited
Solution Approach 1:
The contact portion transitions from a traditional horizontal plate shape to a vertical protruding structure. The contact portion protrudes vertically from the body, increasing the contact area with the terminal while maintaining manufacturing simplicity. This vertical dimensionality change allows for enhanced contact area without complicating the overall structure.
3Strength
If the probe portion requires high wear resistance to endure concentrated load, then the probe portion can withstand mechanical stress, but the conductivity may be insufficient without a highly conductive coupling portion
Solution Approach 1:
Different portions of the probe device are assigned different material properties according to their specific functional requirements. The probe portion (first protrusion) is made of a material with high rigidity and wear resistance to withstand mechanical stress during contact. The coupling portion (second protrusion) is made of a material with high conductivity to ensure efficient electrical signal transmission. This local differentiation of material quality allows each portion to optimize its performance for its specific function.
Data Source
AI summary
The disclosure includes a contact device for electrical test, the contact device for electrical test including a second body portion, a first body portion stacked above the second body portion, a middle portion stacked above the first body portion, and having a first protrusion that is sharp and has a first apex portion, the first protrusion being formed on an upper side of the middle portion, and the first body portion, the middle portion, and the contact portion are sequentially and upwardly stacked, the middle portion and the contact portion include materials different from each other, and a first protrusion is provided inside the second protrusion.