Multistage Trapping Tower Gas Flow for By-Product Collection
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Solution Overview
Problem
The existing apparatus for trapping reaction by-products in semiconductor manufacturing processes faces reduced efficiency over time due to accumulation on trapping surfaces, leading to shortened use duration and increased costs, as the available trapping region is not fully utilized.
Innovation Solution
The apparatus divides the internal trapping tower into multiple stages, with gas flowing to an inner region during the initial use duration for trapping and then to an outer region as the use duration progresses, utilizing planar cross-shaped vertical plates and vortex plates to enhance trapping efficiency and prevent leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If gas flows only to the outer region of the internal trapping tower, then the structure is simple, but the trapping efficiency deteriorates rapidly due to limited trapping region utilization
Solution Approach 1:
The internal trapping tower is divided into multiple stages with distinct flow paths. During the former part of use duration time, gas flows to the lower side of the inner region of the intermediate trapping unit. During the latter part, gas flows to the outer region. This segmentation allows different regions to be utilized at different times, resolving the contradiction between structural simplicity and trapping efficiency.
Solution Approach 2:
The gas flow path is made dynamic by changing it according to the use duration time and trapping amount. The system transitions from utilizing the inner region to utilizing the outer region as trapping progresses. This dynamic adaptation allows the trapping tower to maintain high trapping efficiency throughout its operational life without requiring complex multi-region structures simultaneously.
2Device complexity
If the internal trapping tower structure is simplified, then the device complexity is reduced, but the available trapping region cannot be sufficiently utilized
Solution Approach 1:
The system ensures continuous utilization of the trapping region by switching flow paths based on trapping progress. The inner region is utilized first, followed by the outer region, ensuring that the entire available trapping area is continuously engaged throughout the use duration time. This continuous utilization maximizes the effective trapping area without requiring complex structural modifications.
3Productivity
If the trapping region is expanded to outer regions, then the trapping efficiency is improved, but the risk of by-product leakage increases
Solution Approach 1:
The trapping tower is segmented into inner and outer regions that are utilized sequentially rather than simultaneously. This segmentation allows for controlled expansion into the outer region only after the inner region has been充分 utilized, reducing the risk of leakage while maximizing trapping efficiency over time.
Solution Approach 2:
The system performs preliminary trapping in the inner region before expanding to the outer region. This preliminary action ensures that the trapping process is stable and controlled before utilizing additional trapping areas, thereby preventing by-product leakage while improving overall trapping efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration expands the available trapping region, increases trapping efficiency, and prolongs the use duration of the apparatus by allowing additional trapping reactions to occur, thereby improving the overall efficiency and reducing operational costs.
Implementation Method 1
allows gas, which is discharged from a process chamber during a semiconductor manufacturing process, to flow to an inner region of an internal trapping tower in the apparatus for trapping of a reaction by-product during a former part of a use duration time, and expands an available trapping region, so that an additional trapping reaction occurs, by allowing gas to flow to an outer region of the internal trapping tower during a latter part of the use duration time
Implementation Method 2
the reaction by-products are mainly attached or accumulated between a housing and an outer side of a trapping plate of the internal trapping tower
Implementation Method 3
apparatus for trapping of a reaction by-product traps a reaction by-product contained in exhaust gas discharged from the process chamber
Data Source
AI summary
The present disclosure relates to an apparatus for trapping of a reaction by-product capable of expanding the area for collection by inducing a gas flow, in which an internal trapping tower of the apparatus for trapping of a reaction by-product, which traps a reaction by-product contained in gas discharged from a process chamber during a semiconductor manufacturing process, is divided into multiple stages, the introduced gas is guided to a lower side of an inner region of an intermediate trapping unit provided as a space portion and discharged to an outer region while a trapping reaction occurs according to the reaction by-product trapping amount during a former part of a use duration time.