Multi-Stage Vacuum Pump Housing for Differential Chamber Pumping

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Solution Overview

Problem

Existing vacuum systems require multiple pumps for differentially pumping multiple chambers, leading to high costs and space inefficiencies.

Innovation Solution

A multi-stage positive displacement vacuum pump with a pump housing featuring stator components and sealing members to modify fluid conveyance, allowing for differential pumping of multiple chambers using a single pump.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple pumps are used for differentially pumping multiple chambers, then each chamber can be pumped independently, but the cost and space requirements increase significantly

Engineering Contradiction:

Improvedifferential pumping capabilityVSAvoidspace requirements

Core Design Contradiction:

Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent combines multiple pumping functions into a single multi-stage pump unit. The pump housing contains multiple stages with each stage having pumping elements that can operate independently or in combination, allowing one physical pump to replace multiple separate pumps while maintaining differential pumping capability for multiple chambers

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The multi-stage pump is designed with universal functionality to handle multiple chambers simultaneously. Each stage can be configured to pump different chambers at different vacuum levels, and the pump can operate in various modes (single-stage, multi-stage, with or without bypass) to adapt to different differential pumping requirements

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If multiple pumps are used for differentially pumping multiple chambers, then each chamber can be pumped independently, but the system cost increases

Engineering Contradiction:

Improvedifferential pumping capabilityVSAvoidsystem cost

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The pump design allows flexible configuration where stages can be used or bypassed depending on requirements. The bypass mechanism allows fluid to skip certain stages, enabling the same physical pump to adapt to different pumping requirements without requiring additional hardware, thereby reducing system cost

Inventive Principle:

Principle #34Discarding and recovering

3Area of stationary object

If a single multi-stage pump is used, then cost and space efficiency improve, but the ability to independently pump multiple chambers decreases

Engineering Contradiction:

Improvespace requirementsVSAvoidindependent chamber pumping

Core Design Contradiction:

Area of stationary objectVSAdaptability or versatility

Solution Approach 1:

The pump is divided into multiple independent stages, each with its own pumping elements (rotors and stators). Each stage can be independently controlled and configured to pump different chambers. The segmentation allows the single pump to function as multiple independent pumping units while sharing common housing and drive mechanisms

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The pump incorporates dynamic bypass mechanisms that allow fluid flow paths to be changed during operation. Bypass channels and controllable connections allow certain stages to be activated or deactivated based on requirements, enabling independent pumping of different chambers from a single multi-stage unit

Inventive Principle:

Principle #15Dynamics

4Productivity

If conventional multi-stage pump design is used, then pumping efficiency is maintained, but device complexity increases

Engineering Contradiction:

Improvepumping efficiencyVSAvoidpump structure

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

Multiple pumping stages are nested within a single pump housing. Each stage contains rotor and stator elements that are compactly arranged, with subsequent stages positioned within or adjacent to previous stages. This nesting reduces overall device complexity compared to using separate pumps while maintaining multi-stage pumping efficiency

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

Multiple pumping functions are merged into shared components. The pump housing, drive shaft, and sealing systems are shared across all stages, reducing the number of separate components needed. Fluid transfer channels are integrated within the housing to connect stages without requiring external piping, simplifying the overall structure

Inventive Principle:

Principle #5Merging (Combining)

Data Source

PatentEP4048899B1Multi-stage positive displacement vacuum pump

Publication Date: 2025.12.03 EDWARDS LTD

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AI summary

Aspects of the present invention relate to a stator component (5) for a pump housing (1). The stator component (5) has a plurality of fluid inlet channels (19-n) for conveying fluid to respective pumping chambers (11-n). The fluid inlet channels (19-n) each have an inlet port (21-n) for conveying fluid into the pumping chamber (11-n). A plurality of fluid transfer channels (31-n) are provided for conveying fluid to a respective one of the fluid inlet channels (19-n). The fluid transfer channels (31-n) each have an inlet for receiving pumped fluid. The stator component (5) is adapted to receive at least one sealing member (43) for inhibiting the conveyance of fluid into an associated one of the pumping chambers (11-n). Aspects of the present invention relate to a pump housing (1), a cover plate (9) and a pump (3). Aspects of the present invention also relate to a method of converting a stator component (5, 7).