Multi-Way Piston Valve for High-Flow Deposition Systems
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Solution Overview
Problem
Traditional valve systems for semiconductor processing face challenges in tight space constraints and high flow rates due to large body sizes and poor flow coefficients, making them unsuitable for applications requiring high flow rates within small spatial envelopes.
Innovation Solution
A piston valve assembly with a linear motion actuator that switches fluid flow between multiple outlet paths with a low pressure drop, featuring a compact design and multiple internal flow paths, allowing for high flow rates and efficient fluid management in confined spaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional valve systems are used to ensure high-purity chemically rated characteristics, then fluid transport quality is improved, but valve body size becomes very large relative to pipe internal diameter, making them unsuitable for tight space constraints
Solution Approach 1:
The valve is segmented into a body portion and a piston portion with modular construction. The piston includes multiple sections (first section with first flow path, second section with second flow path) that can be independently configured. This segmentation allows the valve to maintain high-purity characteristics while reducing overall valve body size to fit tight space constraints.
Solution Approach 2:
The invention transitions from traditional lateral flow paths to a longitudinal flow path through the piston. The fluid flows axially through the piston from inlet to outlet, utilizing the length dimension rather than requiring large lateral dimensions. This dimensional change enables compact valve body size while maintaining high flow coefficients.
2Volume of moving object
If traditional diaphragm valves are used to achieve compact size, then space constraints are satisfied, but flow coefficients are poor, making them unsuitable for high flow rate applications
Solution Approach 1:
Different sections of the piston have different flow path characteristics optimized for their specific functions. The first section provides a first flow path while the second section provides a second flow path. This local differentiation allows the compact piston structure to achieve high flow coefficients suitable for high flow rate applications.
Solution Approach 2:
The valve utilizes hydraulic principles with fluid flowing through the piston bore in a longitudinal direction. The piston sections are configured to provide low resistance flow paths, and the linear motion actuator uses hydraulic or pneumatic force to move the piston, enabling high flow rates in a compact design.
3Adaptability or versatility
If multi-way valve functionality is implemented to switch fluid flow between multiple outlet paths, then fluid management flexibility is improved, but valve body complexity and size increase
Solution Approach 1:
The piston is designed with multiple flow paths (first flow path in first section, second flow path in second section) that can be activated by moving the piston to different positions. A single piston component performs multiple functions of directing fluid to different outlets, eliminating the need for separate valves for each flow path and reducing overall device complexity.
Solution Approach 2:
The valve uses dynamic piston movement along the longitudinal axis to switch between different flow paths. The linear motion actuator dynamically positions the piston to connect the inlet to different outlet paths based on process requirements. This dynamic configuration provides multi-way valve functionality without requiring a complex static structure.
Data Source
AI summary
A valve assembly used with a process chamber for depositing a film on a wafer. A valve body surrounds a bore and includes an inlet, a first outlet and a second outlet, at least one of them exiting into the process chamber. A piston includes a first section having a first flow path, and a second section having a second flow path. A linear motion actuator is adapted to couple with the piston and controls linear movement of the piston through the bore between a first position and a second position. In the first position, the first section of the piston is aligned with the inlet such that fluid flows to the first outlet via the first flow path. In the second position, the second section of the piston is aligned with the inlet such that fluid flows to the second outlet via the second flow path.