Multizone Thermal Interface for Independent Multi-Die Package Cooling

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Solution Overview

Problem

Existing thermal management techniques for semiconductor devices, particularly those with multiple chips or dies, lack the ability to independently control thermal conditions in different regions, leading to inefficient testing and reliability issues.

Innovation Solution

A thermal management system with independently controllable zones interfaces with multi-die packages, allowing for separate control of thermal conditions in each region through a coolant delivery system managed by a control system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If existing thermal management techniques are used for multi-die packages, then general cooling is provided, but independent thermal control in different regions is not achieved

Engineering Contradiction:
Improvethermal control capabilityVSAvoidthermal management system complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The thermal management system is divided into multiple independently controllable zones, with each zone having its own heating or cooling capability. This segmentation allows different regions of the multi-die package to be controlled at different temperatures, resolving the contradiction between achieving independent thermal control and maintaining system simplicity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different zones within the thermal management system are assigned different thermal properties and control parameters based on the specific requirements of the underlying dies. High-power dies receive enhanced cooling while low-power dies receive standard cooling, optimizing thermal management for each local region's needs.

Inventive Principle:
Principle #3Local quality

2Productivity

If uniform cooling is applied to all dies, then simple thermal management is maintained, but testing time increases due to inability to optimize cooling for high-power devices

Engineering Contradiction:
Improvetesting efficiencyVSAvoidcoolant delivery system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The coolant delivery system dynamically adjusts flow rates to different zones based on real-time thermal requirements. High-power dies receive higher coolant flow rates during intensive testing, while low-power dies receive reduced flow, optimizing testing efficiency without requiring a permanently complex system architecture.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system changes operational parameters (coolant flow rate, temperature) for different zones based on the specific testing requirements and power consumption characteristics of each die, enabling optimized testing efficiency without permanent structural complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances cooling efficiency, reduces testing time, and improves binning efficiency by allowing targeted cooling of high-power devices, thereby ensuring quality and reliability of multi-die packages.

Implementation Method 1

A coolant is established to the thermal management component

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

delivering a first thermal condition to a first region of the semiconductor device while delivering a second thermal condition to a second region

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS20250246516A1Multizone thermal device for semiconductor structures
Publication Date: 2025.07.31 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250246516A1 patent drawing
  • US20250246516A1 patent drawing
  • US20250246516A1 patent drawing

AI summary

A test method and system of testing a semiconductor device is provided. The method includes placing a packaged semiconductor device on a tester and engaging a thermal management component with an upper surface of the packaged semiconductor device. The packaged semiconductor device is tested using the tester, and during the testing a first thermal condition is delivered to a first region of the thermal management component while delivering a second thermal condition is delivered to a second region of the thermal management component. The first thermal condition is different than the second thermal condition.