Multizone Showerhead Thermal Control for Wafer Uniformity

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Solution Overview

Problem

Conventional semiconductor fabrication processes face challenges in controlling the thermal profile of showerheads due to non-uniform deposition, which leads to yield-reducing defects and reduced process module uptime, especially with extreme temperature regimes and new chemistries.

Innovation Solution

A thermally controllable showerhead assembly with multiple zones, including independently controllable cooling zones and heating components, allows for precise temperature control through fluid flow and heating adjustments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional gas showerheads are used in semiconductor fabrication processes, then gas-phase chemistry delivery is achieved, but thermal non-uniformity and deposition defects occur

Engineering Contradiction:

Improvewafer uniformityVSAvoidprocess module uptime

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The showerhead is divided into multiple independently controllable thermal zones (e.g., center zone, annular zones) with separate heating/cooling control for each zone. This segmentation allows precise local temperature management to prevent non-uniform deposition and maintain process reliability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the showerhead are given different thermal properties and control mechanisms. The center region may have different heating/cooling characteristics compared to annular regions, allowing each zone to be optimized for its specific deposition requirements and preventing flake formation.

Inventive Principle:

Principle #3Local quality

2Manufacturing precision

If thermal control is applied to the showerhead, then deposition uniformity is improved, but device complexity increases

Engineering Contradiction:

Improvecenter to edge uniformityVSAvoidshowerhead assembly complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

Multiple thermal control functions (heating and cooling) are integrated into a single showerhead assembly. The system combines heating elements and cooling channels within the same structure, allowing centralized control of thermal zones without requiring separate devices.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The showerhead assembly serves multiple functions: gas distribution, thermal control (both heating and cooling), and deposition uniformity management. This multi-functionality reduces the need for separate components while achieving precise thermal control.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If extreme temperature regimes are used in fabrication processes, then new chemistries can be adopted, but unwanted deposition and flaking increase

Engineering Contradiction:

Improvechemistry compatibilityVSAvoiddeposition flaking

Core Design Contradiction:

Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The showerhead thermal profile is made dynamically adjustable with real-time control of heating and cooling in different zones. This dynamic control allows the system to adapt to different chemistry requirements while maintaining optimal temperature distribution to prevent flake formation during extreme temperature processes.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances process performance and uptime by providing uniform temperature distribution and enhancing process performance and reducing defects, and improves process uptime by enhancing process uptime by enabling precise temperature control and reducing defects.

Implementation Method 1

each of the plurality of thermally controllable zones further includes at least one inlet configured to allow a cooling liquid to flow into a respective thermally controllable zone

Methodology Applied

Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

The plurality of thermally controllable zones may include a first set of resistive heaters

Methodology Applied

Scientific EffectResistive heating: Joule Heating

Data Source

PatentUS20260002260A1Multizone thermally controlled showerhead

Publication Date: 2026.01.01 ASM IP HLDG BV

AI summary

A showerhead assembly for distributing a gas within a reaction chamber is provided. The showerhead assembly includes a top plate, a gas distribution plate, and a plurality of thermally controllable zones. The gas distribution plate is coupled to the top plate. The gas distribution plate also has a top surface facing the top plate and a bottom surface configured to face a substrate disposed within the reaction chamber. The plurality of thermally controllable zones are fabricated in at least one of the top plate and the gas distribution plate. Methods of controlling thermal profile of showerhead assemblies and methods of making showerhead assemblies are also described.