Multizone Substrate Support Heater for Local Temperature Compensation
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Solution Overview
Problem
Existing substrate supports with heaters lack sufficient resolution to compensate for localized temperature and process variations during substrate processing, leading to inadequate control over heating and cooling.
Innovation Solution
A multilayer substrate support with a heater assembly comprising a first member for heat distribution, a second member with resistive heating elements for local temperature compensation, a third member with base heating zones for gross temperature control, and a control system coupled to resistive temperature detectors and multiplexors to independently control each heating element, allowing precise temperature management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single heater is used to heat the substrate, then the substrate can be heated to a desired temperature, but the heater cannot compensate for localized temperature variations
Solution Approach 1:
The heater is divided into multiple independently controllable heating zones (first heating zone, second heating zone, third heating zone, etc.), each capable of being controlled separately to compensate for localized temperature variations across the substrate surface
Solution Approach 2:
Each heating zone is equipped with its own temperature sensor and control circuit, allowing localized temperature adjustment and compensation for specific areas of the substrate, achieving non-uniform temperature distribution when needed
2Measurement precision
If multiple heating zones are added to improve temperature control resolution, then localized temperature compensation is achieved, but the device complexity increases
Solution Approach 1:
Multiple temperature sensors and heating elements are integrated into a unified multilayer heater assembly with a shared control system, reducing overall system complexity while maintaining the capability for localized temperature control
Solution Approach 2:
The control system is designed to manage multiple heating zones and temperature sensors through a single integrated controller, allowing the same control circuitry to serve multiple functions and reduce redundant components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides precise temperature control and uniform heat distribution across substrates, enabling effective compensation for localized variations and maintaining desired temperature profiles from 50°C to 800°C.
Implementation Method 1
a second member disposed beneath the first member, the second member including a plurality of resistive heating elements, wherein the plurality of resistive heating elements provide local temperature compensation to the first member to heat the substrate when present
Implementation Method 2
a third member disposed beneath the second member, the third member including one or more base heating zones to provide a base temperature profile to the first member
Data Source
AI summary
Embodiments of substrate supports with a heater are provided herein. In some embodiments, a substrate support may include a first member to distribute heat to a substrate when present above a first planar surface of the first member, a second member disposed beneath the first member, the second member including a plurality of resistive heating elements, wherein the plurality of resistive heating elements provide local temperature compensation to the first member to heat the substrate when present, a third member disposed beneath the second member, the third member including one or more base heating zones to provide a base temperature profile to the first member, and a fourth member disposed beneath the third member, the fourth member including a first set of electrical conductors coupled to each of the resistive heating elements.