MWCNT Rectenna Array Fabrication Without Deep Submicron Masking

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Solution Overview

Problem

Current manufacturing processes for visible light rectenna arrays are expensive due to the need for deep submicron masking technology, which is more costly than traditional solar cell processes, and existing technologies do not efficiently convert sunlight into electricity without semiconductor transistors.

Innovation Solution

The development of multi-walled carbon nanotube (MWCNT) rectenna arrays using self-aligning process steps and IC manufacturing techniques, incorporating geometric diodes and antennas of varying lengths and orientations to optimize sunlight conversion, with the use of nickel catalysts and graphene for efficient energy conversion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of moving object

If deep submicron masking technology is used to manufacture visible light rectenna arrays, then the antenna dimensions can be reduced to tens of nanometers for visible light frequency, but the manufacturing cost increases significantly compared to traditional solar cell processes

Engineering Contradiction:
Improveantenna dimensionVSAvoidmanufacturing cost
Core Design Contradiction:
Length of moving objectVSEase of manufacture

Solution Approach 1:

The patent replaces traditional mechanical lithography masking processes with a self-organizing chemical growth process. Carbon nanotubes are grown vertically from catalyst patterns using chemical vapor deposition, where the catalyst distribution (created by simple photolithography) automatically defines the antenna positions and dimensions. This eliminates the need for expensive deep submicron masking while achieving the required tens-of-nanometers precision through the inherent self-organization of the nanotube growth process.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Device complexity

If metal-oxide-metal rectifying diodes are used in the array core, then semiconductor transistors are eliminated and manufacturing simplicity improves, but the efficiency may be reduced compared to traditional rectifiers

Engineering Contradiction:
Improvetransistor requirementVSAvoidconversion efficiency
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The patent employs a composite rectifying structure where carbon nanotubes (providing rectification) are integrated with metal electrodes and dielectric materials. The carbon nanotube itself acts as the rectifying element due to its inherent non-linear electrical characteristics, eliminating the need for separate metal-oxide-metal diode structures or semiconductor transistors. This composite approach maintains manufacturing simplicity while achieving efficient energy conversion through the unique electronic properties of the carbon nanotube material.

Inventive Principle:
Principle #40Composite materials

3Ease of manufacture

If carbon nanotube structures are used for antenna elements, then existing IC manufacturing techniques can be utilized reducing cost, but the manufacturing process complexity increases compared to traditional solar cell fabrication

Engineering Contradiction:
Improvemanufacturing technique compatibilityVSAvoidprocess steps
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent performs preliminary patterning of catalyst materials (such as nickel or iron) onto the substrate using standard photolithography and lift-off techniques before the carbon nanotube growth step. This preliminary action creates a template that automatically guides the subsequent chemical vapor deposition process, where carbon nanotubes grow vertically only at the catalyst locations. This approach leverages existing IC manufacturing capabilities while simplifying the overall process by decoupling the patterning step from the nanotube formation step.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The MWCNT rectenna arrays achieve efficient conversion of sunlight into electricity using existing IC manufacturing techniques, reducing costs and eliminating the need for semiconductor transistors, while maximizing the reception of ambient sunlight across the full spectrum.

Implementation Method 1

MWCNT rectenna arrays for converting sunlight into electricity

Methodology Applied
Scientific EffectOptical rectification:

Implementation Method 2

The antennas may be of varying lengths and orientations, distributed for maximum reception of substantially the full spectrum of ambient sunlight

Methodology Applied
Scientific EffectCatalysis: Catalysis

Implementation Method 3

connect multi-walled CNTs (MWCNTs) to carbonized gold pads for low resistance interconnect

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11824264B2Solar antenna array fabrication
Publication Date: 2023.11.21 NOVASOLIX
  • US11824264B2 patent drawing
  • US11824264B2 patent drawing
  • US11824264B2 patent drawing

AI summary

Methods for constructing multi-walled carbon nanotube (MWCNT) antenna arrays, may include: variable doping of the MWCNTs, forming light pipes with layers of variable dielectric glass, forming geometric diodes on full-wave rectified devices that propagate both electrons and holes, using clear conductive ground plans to form windows that can control a building's internal temperature, and generating multiple lithographic patterns with a single mask.