Nadic Anhydride Polymers for Low-k Dielectric Films
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Solution Overview
Problem
Current materials for microelectronic and optoelectronic devices face challenges in providing low dielectric constant, thermal stability, transparency, and cost-effectiveness, especially for sub-micron geometries, with existing polymers like acrylics and polyimides lacking in thermal stability and transparency, and fluorinated monomers being expensive and causing metal corrosion.
Innovation Solution
Development of polymers derived from nadic anhydride with specific repeating units that form both positive and negative tone images upon actinic radiation, offering low dielectric constant, thermal stability, and cost-effectiveness, along with improved solubility and thixotropic properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If acrylic polymers are used for photoimaging, then photoimaging properties and cost are improved, but thermal stability deteriorates (not suitable for temperatures higher than 200°C)
Solution Approach 1:
The patent uses composite materials by combining nadic anhydride units with norbornene-type monomers containing polyalkylene oxide pendent groups. This composite structure integrates the photoimaging capability of acrylic-like polymers with the thermal stability of polyimide structures, achieving both low-cost photoimaging and high thermal stability (maintaining properties at temperatures above 200°C).
Solution Approach 2:
The patent changes the chemical structure parameters by incorporating specific repeating units with polyalkylene oxide pendent groups and controlling the ratio of nadic anhydride to norbornene monomers. This parameter optimization enables the polymer to achieve both good photoimaging properties and enhanced thermal stability without requiring expensive fluorinated monomers.
2Temperature
If polyimides are used for thermal stability, then thermal properties are improved, but transparency and aqueous base developability deteriorate
Solution Approach 1:
The patent applies local quality by incorporating polyalkylene oxide pendent groups at specific locations within the polymer structure. These localized polyether segments provide aqueous base developability and transparency, while the overall polyimide backbone maintains thermal stability. This localized modification allows the material to exhibit multiple properties simultaneously.
3Quantity of substance
If fluorinated monomers are used to reduce dielectric constant, then low-k properties are improved, but cost and metal corrosion increase
Solution Approach 1:
The patent replaces expensive fluorinated monomers with cheaper nadic anhydride and norbornene-type monomer combinations that achieve similar low dielectric constant properties. This substitution uses more economical materials to achieve the same electrical performance without the harmful side effects of fluorine-containing compounds.
Solution Approach 2:
The patent converts the potential harm of using expensive fluorinated monomers (metal corrosion, high cost) into a benefit by discovering that the nadic anhydride-based polymers with polyalkylene oxide groups can achieve comparable or superior low-k properties without the harmful effects, thus turning a problematic approach into a successful alternative.
4Temperature
If materials are processed at high temperatures (>300°C), then thermal stability is improved, but compatibility with optoelectronic device elements deteriorates
Solution Approach 1:
The patent optimizes the processing temperature parameter by formulating compositions that achieve adequate thermal stability at lower curing temperatures (below 300°C). The nadic anhydride-polymer structure provides sufficient thermal resistance for optoelectronic devices without requiring the extreme temperatures that would damage sensitive device elements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The polymers exhibit excellent photopatternable properties, forming high-quality images suitable for sub-micron devices with low dark field loss, improved thermal reflow, and chemical stability, addressing the limitations of existing materials.
Implementation Method 1
polymers derived from nadic anhydride with specific repeating units that form both positive and negative tone images upon actinic radiation
Data Source
AI summary
Various vinyl addition polymers of nadic anhydride are disclosed. Examples of such polymers include copolymers and terpolymers of nadic anhydride with a wide variety of norbornene-type monomers. The nadic anhydride polymers are found to be useful in forming a wide variety of photosensitive compositions, both positive and negative, which are capable of forming high resolution imagable films exhibiting excellent dielectric properties (low-k) and thermal properties, and thus are useful in the fabrication of a variety of microelectronic and optoelectronic devices, among others.