Nano Bubble Mixing Member for Substrate Cleaning
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Solution Overview
Problem
Existing cleaning processes struggle to effectively remove particles from nano-sized spaces between patterns on substrates due to the formation of bubbles that are unstable and break before reaching these spaces, limiting the cleaning force and efficiency.
Innovation Solution
An apparatus and method that include a liquid supply unit with a mixing member to form nano-sized bubbles by mixing a treatment solution with gas, allowing for controlled flow rates and pressures to ensure bubble diameters are 1 micrometer or less, enabling effective cleaning in tight spaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If ultrasonic waves are used to form bubbles in treatment solution, then cleaning force is provided through bubble breakage, but bubble diameters become several micrometers to tens of micrometers which are too large to penetrate nano-sized spaces between patterns
Solution Approach 1:
The patent changes the key parameter of bubble diameter from micrometer scale (ultrasonic method) to nanometer scale (1 micrometer or less) by using a mixing member that generates fine bubbles through controlled mixing of treatment solution and gas, enabling penetration into nano-sized spaces between patterns while maintaining cleaning effectiveness
Solution Approach 2:
The patent uses a mixing member that introduces gas into treatment solution under controlled pressure and flow conditions to generate fine bubbles, replacing the ultrasonic wave method with a pneumatic-hydraulic mixing approach that achieves smaller, more stable bubble sizes suitable for nano-space cleaning
2Reliability
If bubbles are formed by ultrasonic waves, then particle removal is attempted, but bubbles become unstable and break before reaching spaces between patterns
Solution Approach 1:
The patent changes bubble generation parameters by using controlled gas injection and mixing rather than ultrasonic cavitation, producing bubbles with diameters of 1 micrometer or less that maintain stability throughout the treatment process and reach the substrate surface without premature breakage
Solution Approach 2:
The mixing member acts as an intermediary device that stabilizes bubble formation by controlling the interaction between gas and treatment solution, ensuring bubbles are generated with appropriate size and stability to reach and act upon particles in nano-sized spaces
3Productivity
If treatment solution is supplied to substrate, then cleaning process is performed, but conventional methods cannot effectively clean particles in spaces between patterns due to large bubble sizes
Solution Approach 1:
The patent changes the critical parameter of bubble diameter to 1 micrometer or less, enabling effective cleaning in nano-sized spaces between patterns while maintaining high cleaning efficiency through controlled mixing of treatment solution and gas in the mixing member
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus improves cleaning force by forming nano-sized bubbles that can penetrate and effectively remove particles from spaces between patterns, enhancing cleaning efficiency and reducing the influence of buoyancy, while maintaining a strong van der Waals force for improved cleaning performance.
Implementation Method 1
a mixing member installed on the liquid supply line and including a mixing space formed therein... the gas supplied through the inflow port is mixed with the treatment solution in the mixing space to form nano-sized bubbles
Implementation Method 2
a nozzle discharging the treatment solution to a top surface of the substrate
Implementation Method 3
an ultrasonic nozzle 4 may provide ultrasonic waves to the treatment solution supplied on the substrate. Bubbles may be formed in the treatment solution provided with the ultrasonic waves. The bubbles may repeatedly contract and expand by the ultrasonic waves
Implementation Method 4
The bubbles may repeatedly contract and expand by the ultrasonic waves so as to be broken, and the particles adhered to the substrate may be removed by a shock wave generated during the breakage of the bubbles
Implementation Method 5
maintaining a strong van der Waals force for improved cleaning performance
Data Source
AI summary
Embodiments of the inventive concepts provide an apparatus and a method for treating a substrate. The apparatus includes a substrate support unit supporting the substrate, and a liquid supply unit supplying a treatment solution to the substrate supported by the substrate support unit. The liquid supply unit includes a nozzle discharging the treatment solution to the substrate, a liquid supply line supplying the treatment solution to the nozzle, a mixing member installed on the liquid supply line, a mixing space formed within the mixing member, and a gas supply line connected to the mixing member to supply a gas into the mixing space. The mixing member includes a body within which the mixing space is formed, and an inflow port combined with the body such that the gas supplied through the inflow port is mixed with the treatment solution in the mixing space to form nano-sized bubbles.