Nano-Diamond Composite Substrate for UV-LED Light Extraction

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Solution Overview

Problem

The limited hole injection efficiency of p-type AlGaN layers in UV-LEDs leads to poor light extraction efficiency due to strong absorption and low reflectivity of ultraviolet light, causing heat buildup and reliability issues.

Innovation Solution

A composite substrate with a nano-diamond structure is used, featuring nano-diamond protrusions and gaps, which allows for the growth of semiconductor layers with improved conductive properties and light reflection, reducing UV light absorption and enhancing light extraction efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If p-GaN layer is used to improve hole injection efficiency, then hole injection efficiency is improved, but light extraction efficiency deteriorates due to strong UV light absorption

Engineering Contradiction:
Improvehole injection efficiencyVSAvoidlight extraction efficiency
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent extracts the problematic p-GaN layer from the device structure and replaces it with a p-type AlOxGaN layer. This removal of the light-absorbing p-GaN layer while maintaining hole injection functionality through the alternative p-type AlOxGaN material resolves the contradiction between hole injection efficiency and light extraction efficiency.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the material composition parameter from p-GaN to p-type AlOxGaN, which has different optical properties. The AlOxGaN material maintains the necessary electrical properties for hole injection while having reduced UV light absorption, thereby resolving the contradiction through material parameter modification.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If p-GaN layer is used to make p-type ohmic contacts, then hole injection efficiency is improved, but device temperature rises due to heat generation from absorbed light

Engineering Contradiction:
Improvehole injection efficiencyVSAvoiddevice temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The patent removes the heat-generating p-GaN layer from the structure and replaces it with p-type AlOxGaN material that does not strongly absorb UV light. This extraction eliminates the source of heat generation while preserving the hole injection function, thereby resolving the contradiction between hole injection efficiency and device temperature control.

Inventive Principle:
Principle #2Taking out (Extraction)

3Ease of manufacture

If conventional substrate is used, then manufacturing is simple, but light extraction efficiency is low due to UV light absorption

Engineering Contradiction:
Improvesubstrate manufacturing simplicityVSAvoidlight extraction efficiency
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent employs a composite substrate structure consisting of sapphire substrate, AlN buffer layer, and p-type AlOxGaN layer. This composite structure combines the manufacturing advantages of sapphire with the optical and electrical benefits of AlN and AlOxGaN, achieving both ease of manufacture and high light extraction efficiency by preventing UV light absorption.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The nano-diamond structure effectively increases light extraction efficiency and reduces heat dissipation issues, improving the performance and reliability of UV-LEDs by minimizing UV light absorption and enhancing electron reflection.

Implementation Method 1

enhancing electron reflection

Methodology Applied
Scientific EffectElectron reflection: Reflection

Implementation Method 2

minimizing UV light absorption

Methodology Applied
Scientific EffectUV light absorption: Absorption (EM radiation)

Data Source

PatentUS20240021754A1Composite substrates, photoelectric devices, and manufacturing methods thereof
Publication Date: 2024.01.18 ENKRIS SEMICON
  • US20240021754A1 patent drawing
  • US20240021754A1 patent drawing
  • US20240021754A1 patent drawing

AI summary

A composite substrate, a photoelectric device and a preparation method therefor. The composite substrate comprises a base substrate and a nano-diamond structure located on the base substrate; the nano-diamond structure comprises a plurality of nano-diamond protrusions arranged at intervals, and a gap is provided between two adjacent nano-diamond protrusions. The photoelectric device comprises the composite substrate, and further comprises a first semiconductor layer, an active layer, and a second semiconductor layer stacked on the composite substrate; the first semiconductor layer comprises protruding portions and a flat portion sequentially stacked in the vertical direction, the protruding portions are in the gaps and correspond one-to-one to the gaps, and the flat portion is located on the protruding portions and the nano-diamond structure. The preparation method for the photoelectric device is used for manufacturing the photoelectric device.