Dynamic Nano Focusing System with Piezo Actuator Segmentation

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Solution Overview

Problem

Current nanofocusing systems in microscopy and interferometry are limited by slow focusing processes and high operational costs, which restrict their application possibilities and efficiency.

Innovation Solution

A dynamic nanofocusing system incorporating a lever-transformed piezo actuator and a friction-free guide with an elastically deformable solid-state joint, combined with a secondary fine adjustment movement and torque compensation using tubular piezo shear actuators, to enhance focusing dynamics and reduce noise and vibration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a conventional piezo actuator with friction-free guide is used for focusing, then positioning precision is improved, but focusing speed is limited and settling time is several milliseconds

Engineering Contradiction:
Improvepositioning precisionVSAvoidfocusing speed
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

The focusing system is segmented into two independent piezo actuators: a first piezo actuator for coarse adjustment and a second piezo actuator for fine adjustment. This segmentation allows each actuator to be optimized for its specific function, enabling both high positioning precision and fast focusing speed by combining the capabilities of both actuators

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system dynamically switches between coarse and fine adjustment modes based on the focusing requirements. The control unit coordinates both piezo actuators to provide dynamic adjustment capabilities, allowing the system to achieve fast initial focusing followed by precise fine-tuning, thereby improving overall focusing speed without sacrificing precision

Inventive Principle:
Principle #15Dynamics

2Length of moving object

If motorized drives are used for lens positioning, then large adjustment paths are achieved, but response time is slow and service life is reduced

Engineering Contradiction:
Improveadjustment pathVSAvoidresponse time
Core Design Contradiction:
Length of moving objectVSDuration of action of moving object

Solution Approach 1:

The system replaces motorized drives with piezo actuators that utilize piezoelectric effect for direct mechanical displacement. This substitution eliminates the need for mechanical transmission components, providing both large adjustment paths and fast response times while extending service life through contactless actuation

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Object-generated harmful factors

If flexure guides are used for solid-state joint, then friction-free movement is achieved, but shock load resistance and vibration resistance are limited

Engineering Contradiction:
ImprovefrictionVSAvoidshock load resistance
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The system employs composite structural design combining flexure guides with vibration isolation elements and shock-absorbing mechanisms. This composite approach maintains the friction-free movement advantage of flexure guides while adding reliability against shock loads and vibrations through integrated protective structures

Inventive Principle:
Principle #40Composite materials

4Productivity

If focusing process is accelerated, then productivity is improved, but noise emission and vibration increase

Engineering Contradiction:
Improvefocusing process speedVSAvoidnoise emission
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The system uses a compensation mass connected via a third piezo actuator to counterbalance the receiving unit. This counterweight mechanism reduces noise emission and vibration generated during fast focusing operations by offsetting the inertial forces, allowing productivity improvement without excessive noise and vibration

Inventive Principle:
Principle #8Anti-weight (Counterweight)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution accelerates focusing processes, reduces noise and vibration, and increases the dynamic range of nanopositioning systems, enabling faster and more precise adjustments with reduced costs, thereby expanding application possibilities.

Implementation Method 1

a lever-transformed piezo actuator

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

The movement of a flexural joint is based on the elastic deformation of a solid body

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Data Source

PatentEP2740002B1Method and arrangement for operating a dynamic NANO focusing system
Publication Date: 2018.05.09 PHYSIK INSTRUMENTE (PI) GMBH & CO KG
  • EP2740002B1 patent drawingFigure 1~2
  • EP2740002B1 patent drawingFigure 3
  • EP2740002B1 patent drawingFigure 4

AI summary

The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a resiliently deformable solid body joint which is connected to a mounting unit, in particular for a lens, in order to implement the desired adjustment paths for the focusing. According to the invention, in order to increase the dynamics during the focusing process, a secondary fine adjustment movement is superimposed on the primary adjustment movement, said secondary fine adjustment movement having a smaller adjustment path but higher frequency than the primary adjustment movement, wherein, when the fine adjustment is carried out, a determination is made as to whether the focusing result changes, in order to specify according thereto the amount and/or the direction of the primary adjustment movement.