Nano Gap Sensor Manufacturing via Residual Stress Cracking
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Solution Overview
Problem
Existing methods for manufacturing nano gap sensors face challenges in controlling the size and location of nano gaps, leading to non-uniform quality and high production costs, making mass production and commercialization difficult.
Innovation Solution
A method involving the formation of concave portions on a substrate, followed by an insulating layer to create a nano gap through residual stress-induced cracking, and the deposition of sensing patterns and electrodes to produce a nano gap sensor capable of detecting specific materials or gases, such as hydrogen, using palladium or its alloys.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If electron-beam lithography is used to manufacture nano gap, then manufacturing precision and control of gap size/location are improved, but manufacturing cost increases
Solution Approach 1:
The patent replaces the complex electron-beam lithography process with a mechanical stress-based approach. By forming a thin film on the substrate and applying mechanical stress to induce controlled cracking, the method achieves precise nano gap formation without requiring expensive electron beam equipment or complex lithography processes
Solution Approach 2:
The patent changes the fundamental approach from direct pattern drawing to indirect gap formation through stress-induced cracking. By controlling parameters such as thin film thickness, stress magnitude, and application location, the method achieves precise control over gap size and position while using simpler, more cost-effective processes
2Ease of manufacture
If electromigration method is used to manufacture nano gap, then manufacturing process is simple, but manufacturing precision and control of gap size/location deteriorate
Solution Approach 1:
The patent replaces the electromigration process with a mechanical stress application method. Instead of relying on electric current-induced atom migration, the method uses direct mechanical stress to induce controlled cracking in a thin film, achieving both process simplicity and precise gap control
Solution Approach 2:
The patent introduces a thin film as an intermediary layer between the substrate and the desired nano gap structure. This thin film acts as a stress transfer medium that enables precise control over gap formation while maintaining process simplicity
3Productivity
If conventional methods are used to manufacture nano gap sensors, then manufacturing may be performed, but product quality uniformity and reliability deteriorate
Solution Approach 1:
The patent replaces conventional manufacturing methods with a stress-induced cracking approach that produces more uniform results. By controlling the application of mechanical stress and the properties of the thin film, the method achieves consistent gap dimensions and sensor performance across multiple devices
Solution Approach 2:
The patent changes the manufacturing approach to one where key parameters such as gap size and sensor performance are controlled through thin film properties and stress parameters rather than direct geometric constraints, leading to more uniform product quality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables the mass production of nano gap sensors with simplified processes and low costs, resulting in highly sensitive hydrogen sensors that can detect various concentrations of hydrogen with high reliability.
Implementation Method 1
a crack, which occurs when a residual stress generated between the substrate and the insulating layer concentrates at a sharp end of the one or more concave portions
Implementation Method 2
a crack, which occurs when a residual stress generated between the substrate and the insulating layer concentrates at a sharp end of the one or more concave portions
Data Source
AI summary
Provided are a method of manufacturing a nano gap sensor and a nano gap sensor manufactured by the method. According to the method of manufacturing the nano gap sensor, fine cracks are formed in a substrate including a silicon wafer, etc. in order to form the nano gap with simplified processes and low manufacturing costs, and after that, a metal catalyst layer is stacked on the nano gap to manufacture a sensor capable of selectively detecting a certain material or a gas such as hydrogen. In particular, when palladium or a palladium alloy is used as the metal catalyst layer, highly sensitive hydrogen sensors capable of responding various concentrations of hydrogen may be produced in large quantities.