Nano-hole Gas Flow Control Device for Molecular Regime Precision
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Solution Overview
Problem
Existing gaseous flow control devices are unable to manage and control micro-flows in molecular or predominantly molecular regimes at non-vacuum pressures, particularly at atmospheric or higher pressures, limiting their resolution and precision in flow control and measurement.
Innovation Solution
A device with a gaseous flow adjusting interface featuring nano-holes of sub-micrometer dimensions, which can be individually or collectively opened or closed, allowing micro-flows in molecular or predominantly molecular regimes, even at atmospheric or higher pressures, using actuating means and electronic processing to control the nano-holes for precise flow management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional valve systems are used at atmospheric pressure, then flow control is possible, but the flow control resolution is limited to viscous regime flows only
Solution Approach 1:
The valve system is segmented into multiple independently controllable valve elements arranged in parallel, each capable of being opened or closed individually. This segmentation allows precise control of gas flows in molecular regime at atmospheric pressure by selectively activating specific valve elements, overcoming the limitation of conventional single-valve systems that can only handle viscous regime flows.
Solution Approach 2:
The invention transitions from conventional macro-scale valve geometry to nano-scale aperture dimensions. By creating valve elements with aperture diameters in the nanometer range (e.g., 10-100 nm), the system enables molecular regime flow control at atmospheric pressure, adding a dimensional aspect (scale) that fundamentally changes the flow regime characteristics.
2Measurement precision
If nano-holes of sub-micrometer dimensions are used, then molecular regime flow control is enabled at atmospheric pressure, but the device complexity increases
Solution Approach 1:
Multiple valve elements with nano-holes are merged into a single integrated membrane structure. This consolidation allows the system to achieve molecular regime flow control through a unified component rather than requiring complex assemblies of separate valves, thereby enabling precise flow control while managing device complexity through integration.
Solution Approach 2:
The valve elements are designed to be self-actuating through pressure differential effects. The nano-hole structure itself provides the flow control mechanism without requiring external actuation systems for each individual valve element, reducing device complexity while maintaining precise molecular regime flow control capabilities.
3Measurement precision
If miniaturized valve openings are used, then molecular regime flows can be controlled, but the risk of occlusion increases
Solution Approach 1:
Different regions of the valve system have different aperture sizes and geometries optimized for specific functions. The nano-holes are designed with specific local characteristics (e.g., aspect ratio, surface treatment) that reduce particle adhesion and occlusion risk while maintaining molecular regime flow control, addressing the reliability issue through localized structural optimization.
Solution Approach 2:
The valve elements are designed to operate with periodic opening and closing cycles that prevent particle accumulation. By periodically actuating the valves, the system clears potential occlusions before they become problematic, maintaining both micro-flow control capability and reliability in parallel operation.
Data Source
AI summary
Disclosed are devices, systems and methods for gas sampling, for controlling and measuring a gaseous flow, and for controlling a pressure gradient. An exemplary device 1 for controlling a gaseous flow comprises a gaseous flow adjusting interface 2, configured to inhibit or allow a flow of gas through the device 1 in a controlled manner, and control means 3, 4 of the adjusting interface. The adjusting interface 2 comprises a plurality of nano-holes 20. Each of the nano-holes has sub-micrometric dimensions and is suitable to be opened or closed in a controlled manner. The control means 3,4, in turn, comprise actuating means 3, suitable to open or close these nano-holes, and electronic processing means 4, configured to activate the actuation means to open or close individually or collectively the nano-holes 20 in a controlled manner.