Nano-Shape Patterning via Imprint Lithography Templates
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Solution Overview
Problem
Current nano-fabrication techniques for producing nano-patterns are slow and lack sufficient control over size and shape, making them inefficient for achieving desired performance cost-effectively.
Innovation Solution
A system and process that involves forming a nano-shaped template through multiple lithographic steps, including imprint lithography, to create a relief pattern on a substrate, which is then used to replicate nano-shapes efficiently and effectively, using a combination of polymerizable materials and energy sources to achieve precise nano-structures with sharp edges.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If growth processes are used to create nano-patterns, then nano-structures can be formed, but the production speed is slow and control over size and shape is insufficient
Solution Approach 1:
The patent applies preliminary action by first creating a master template with precise nano-scale features through lithography, then using this template to repeatedly imprint nano-patterns onto substrates. The template is prepared in advance with exact geometric control, and subsequent imprints replicate these precise features rapidly without requiring repeated growth processes, thus achieving both high precision and high productivity
Solution Approach 2:
The patent employs copying by creating a master template that contains the desired nano-pattern and using it to repeatedly copy/imprint the same pattern onto multiple substrates. This allows precise size and shape control to be replicated across many products quickly, resolving the contradiction between manufacturing precision and productivity
2Ease of manufacture
If conventional lithography is used for nano-patterning, then patterns can be formed, but the process is slow and costly
Solution Approach 1:
The patent performs preliminary action by creating a durable master template once with high precision lithography, then using this single template for repeated imprints. This amortizes the high initial cost and time investment across many productions, making the overall process cost-effective and efficient
Solution Approach 2:
The patent changes parameters by transitioning from direct lithographic writing on each substrate to template-based imprinting. This parameter change in the manufacturing approach enables rapid replication of patterns, dramatically improving productivity while reducing per-unit cost
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the rapid and cost-effective production of nano-patterns with precise control over size and shape, enhancing the efficiency and performance of nano-fabrication processes.
Implementation Method 1
The liquid is solidified to form a solidified layer that has a pattern recorded therein
Data Source
Figure 1
Figure 2A~2C
Figure 3A~3C
AI summary
Methods for creating nano-shaped patterns are described. This approach may be used to directly pattern substrates and/or create imprint lithography molds that may be subsequently used to directly replicate nano-shaped patterns into other substrates in a high throughput process.