Nanochannel Template Formation for Conductive 3D Battery Electrodes

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Solution Overview

Problem

Current methods for manufacturing three-dimensional electrode structures in solid-state batteries face challenges such as poor mechanical stability due to insulating barrier layers in porous anodic aluminum oxide templates, limited energy and power density, and instability of electroplating baths, which hinder large-scale manufacturing and conformal deposition of active electrode materials.

Innovation Solution

Anodization-based methods are used to transform valve metal layers into templates with spaced channels, where the barrier layers are removed with minimal pore widening or narrowing, allowing for the formation of mechanically stable electrically conductive structures with conformal deposition of active electrode materials on a broad range of metals, suitable for large-scale manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If barrier layers are removed from channel bottoms to enable electroplating, then electrical conductivity is improved, but mechanical stability deteriorates due to poor nanowire connection to substrate

Engineering Contradiction:
Improveelectrical conductivityVSAvoidmechanical stability
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent selectively removes the insulating barrier layer only from the channel bottoms while preserving it on the channel walls. This extraction approach enables electroplating at the substrate interface for electrical conductivity while maintaining the barrier layer's protective function elsewhere, thus resolving the contradiction between electrical conductivity and mechanical stability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies different properties to different locations: the channel bottoms have removed barrier layers for electroplating, while the channel walls retain barrier layers for structural integrity. This local differentiation allows simultaneous achievement of electrical conductivity at interfaces and mechanical stability in the bulk structure

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If anodization voltage is reduced to thin barrier layer for electroplating, then barrier layer thickness is reduced, but pore size and interpore distance decrease

Engineering Contradiction:
Improvebarrier layer thicknessVSAvoidpore size
Core Design Contradiction:
Manufacturing precisionVSVolume of moving object

Solution Approach 1:

The patent performs preliminary anodization to form the porous structure with desired pore size and interpore distance first, then selectively removes barrier layers in subsequent steps. This preliminary formation of the porous network preserves pore dimensions while enabling later barrier layer removal for electroplating without affecting pore size

Inventive Principle:
Principle #10Preliminary action

3Quantity of substance

If three-dimensional electrode structuring is used to increase surface area, then energy density is improved, but manufacturing complexity increases due to conformal coating challenges

Engineering Contradiction:
Improvesurface areaVSAvoidmanufacturing complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The porous anodic aluminum oxide template self-organizes into a regular array of pores with controlled dimensions during anodization, eliminating the need for complex lithography or self-assembly steps. This self-organizing property simplifies manufacturing while achieving high surface area three-dimensional structures

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent uses porous anodic aluminum oxide as a template that provides inherent three-dimensional structure with high surface area. The porous nature allows easy penetration of electroplating solutions and subsequent active material deposition, reducing manufacturing complexity compared to solid structures requiring complex coating processes

Inventive Principle:
Principle #31Porous materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the formation of stable, high-density electrode structures with improved mechanical and electrical contact, increasing the energy and power density of solid-state batteries while being cost-effective and suitable for large-scale production.

Implementation Method 1

a first anodization step anodizing at least part of the valve metal layer in the thickness direction and thereby forming a porous layer of valve metal oxide comprising a plurality of channels

Methodology Applied
Scientific EffectAnodization: Anodising

Implementation Method 2

an etching step in an acidic etching solution or in a basic etching solution, thereby removing the second insulating metal oxide barrier layer from the channel bottoms

Methodology Applied
Scientific EffectEtching:

Implementation Method 3

The plurality of spaced channels may for example comprise a plurality of spaced nanochannels. A relatively cheap method for manufacturing such plurality of electrically conductive nanowires comprises electroplating of a metal in a porous anodic aluminum oxide (AAO) template

Methodology Applied
Scientific EffectElectroplating: Electroplating

Data Source

PatentUS11827992B2Transforming a valve metal layer into a template comprising a plurality of spaced (nano)channels and forming spaced structures therein
Publication Date: 2023.11.28 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • US11827992B2 patent drawing
  • US11827992B2 patent drawing
  • US11827992B2 patent drawing

AI summary

At least one embodiment relates to a method for transforming at least part of a valve metal layer into a template that includes a plurality of spaced channels aligned longitudinally along a first direction. The method includes a first anodization step that includes anodizing the valve metal layer in a thickness direction to form a porous layer that includes a plurality of channels. Each channel has channel walls and a channel bottom. The channel bottom is coated with a first insulating metal oxide barrier layer as a result of the first anodization step. The method also includes a protective treatment. Further, the method includes a second anodization step after the protective treatment. The second anodization step substantially removes the first insulating metal oxide barrier layer, induces anodization, and creates a second insulating metal oxide barrier layer. In addition, the method includes an etching step.