Nanocrater Metal Nanoparticle Catalyst via Plasma Chemical Etching

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Solution Overview

Problem

Current methods for producing nano-sized materials with desired structures and characteristics are hindered by high production costs and limitations in controlling the alignment and size of metal nanoparticles, particularly due to the unavailability of commercially viable templates with nanoscale hole sizes less than 50 nm.

Innovation Solution

A nanocrater catalyst with a nanocrater form of hole structure is developed using a plasma etching and chemical etching process (PTCE), which involves pre-treating metal nanoparticles with plasma to create vacancies and dislocations, followed by chemical etching to form holes, allowing for the production of nano-sized materials with controlled structures and characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional methods (electron beam lithography, micro-contact printing, shadow mask) are used to control alignment or orientation of particles and particle size, then manufacturing precision is improved, but production cost increases and substrate dimensions are restricted to very small dimensions

Engineering Contradiction:
Improvecontrol of alignment and orientation of particlesVSAvoidproduction cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent uses disposable AAO templates that can be easily fabricated and discarded after use. These templates provide precise nanoscale hole structures for catalyst formation without requiring expensive lithography equipment or complex alignment procedures, thereby reducing production costs while maintaining manufacturing precision.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent replaces complex mechanical alignment systems (electron beam lithography, shadow masks) with a simpler chemical etching approach using AAO templates. The self-aligned nature of the template-based method eliminates the need for precise mechanical positioning and alignment equipment, significantly reducing manufacturing complexity and cost.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If AAO templates are used to provide metal catalysts with uniform dimension, then manufacturing precision is improved, but the hole size is limited to more than 100 nm and cannot achieve less than 50 nm

Engineering Contradiction:
Improveuniform dimension of metal catalystsVSAvoidrange of hole size
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent changes the etching parameters (etching time, etching solution concentration, plasma treatment conditions) to control the hole size in AAO templates. By adjusting these parameters, the patent achieves hole sizes less than 50 nm that were previously unattainable with conventional AAO templating, while maintaining uniform dimensions across the catalyst population.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies plasma treatment as a preliminary action before chemical etching to modify the AAO template surface and control pore formation. This pre-treatment step enables better control over the final hole size and uniformity, allowing achievement of sub-50 nm dimensions while maintaining catalyst uniformity.

Inventive Principle:
Principle #10Preliminary action

3Productivity

If metal nanoparticles are used as catalyst to produce nano-sized materials, then productivity is improved, but the structure and characteristics of the resulting materials cannot be precisely controlled

Engineering Contradiction:
Improveproduction of nano-sized materialsVSAvoidstructure and characteristics of resulting materials
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent creates local quality variations in the catalyst structure by forming nanocraters with specific hole sizes and shapes at the center of metal nanoparticles. This local structural modification at the catalyst surface enables precise control over the nucleation and growth of nano-sized materials, allowing control of their structure and characteristics while maintaining high production rates.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent utilizes porous AAO templates to create catalysts with controlled pore structures. The nanocrater holes in the metal nanoparticles serve as templates for forming porous or hollow nano-sized materials with controlled structures. This approach enables simultaneous achievement of high productivity and precise structural control in the resulting materials.

Inventive Principle:
Principle #31Porous materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The nanocrater catalyst enables the manufacture of nano-sized materials with uniform structures and characteristics, such as carbon nanotubes, by regulating the number of walls and thickness, overcoming the limitations of existing methods and achieving desired properties in nano materials.

Implementation Method 1

pre-treating metal nanoparticles with plasma to form vacancy and dislocation between the metal nanoparticles

Methodology Applied
Scientific EffectPlasma etching: Plasma

Implementation Method 2

chemically etching the metal nanoparticles to form a hole at a center of each of the metal nanoparticles

Methodology Applied
Scientific EffectChemical etching: Ablation

Data Source

PatentUS8137760B2Nanocrater catalyst in metal nanoparticles and method for preparing the same
Publication Date: 2012.03.20 KOREA ADVANCED INST OF SCI & TECH
  • US8137760B2 patent drawing
  • US8137760B2 patent drawing
  • US8137760B2 patent drawing

AI summary

Disclosed are a nanocrater catalyst in metal nanoparticles with a nanocrater form of hole structure in center of the catalyst which is useful for manufacturing nano-sized materials and/or articles with desired structure and characteristics, a preparation method thereof including a plasma etching and chemical etching process (“PTCE process”), and nano-sized materials and/or articles manufactured by using the nanocrater catalyst in metal nanoparticles.