Nanogap Sensor Arrays for Precise High-Throughput Molecular Detection
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Solution Overview
Problem
Existing nanogap sensors face challenges in efficiently and accurately evaluating molecular content of analytes due to variations in performance, cost, and size requirements across different applications, particularly in DNA sequencing and gas/liquid detection, necessitating improved design and fabrication techniques.
Innovation Solution
Development of various nanogap sensor designs, including horizontal and vertical configurations, arrays, and electrode arrangements, along with fabrication methods using deposition and etching techniques, to enhance sensitivity and throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If nanogap sensors are designed with different configurations for various applications, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent divides the sensor system into multiple independent nanogap sensor units that can be arranged in arrays. Each sensor unit is a simplified structure with basic electrode components, while the overall system achieves high measurement precision through parallel operation of multiple units. This segmentation allows each component to remain simple while the collective system provides accurate molecular detection across different applications.
Solution Approach 2:
The patent designs nanogap sensors with universal electrode structures and fabrication processes that can be adapted for multiple applications including DNA sequencing, gas detection, and liquid analysis. The same basic sensor architecture and manufacturing methods serve different measurement purposes, reducing the need for completely different designs for each application and thereby lowering overall device complexity.
2Productivity
If multiple nanogap sensors operate in parallel to increase throughput, then productivity is improved, but device complexity increases
Solution Approach 1:
The patent combines multiple nanogap sensors into integrated arrays where sensors share common fabrication processes, electrode patterns, and processing steps. By merging the manufacturing workflow into a unified process that produces multiple sensors simultaneously, the system achieves high throughput without proportionally increasing operational complexity. The sensors work in parallel but are managed through standardized interfaces and procedures.
3Manufacturing precision
If advanced deposition and etching techniques are used to fabricate nanogap sensors, then manufacturing precision is improved, but ease of manufacture decreases
Solution Approach 1:
The patent employs deposition and etching techniques with carefully controlled parameters to achieve precise nanogap dimensions. By optimizing parameters such as deposition thickness, etching time, and material selection, the fabrication process achieves high manufacturing precision for the nanogap structure while maintaining compatibility with existing semiconductor manufacturing equipment and procedures, thereby balancing precision requirements with ease of manufacture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed nanogap sensors improve molecular detection accuracy and efficiency by allowing parallel operation and reduced sensor variations, facilitating high-throughput DNA sequencing and gas/liquid analysis with reduced read errors.
Implementation Method 1
sensors for evaluating analytes based on electron transfer or other transduction methods through a nanometric-sized gap between at least a pair of electrodes
Data Source
AI summary
Embodiments of the disclosure provide various nanogap sensor designs (e.g., horizontal nanogap sensors, vertical nanogap sensors, arrays of multiple nanogap sensors, various arrangements for making electrical connections to the electrodes of nanogap sensors, etc.), as well as various methods which may be used to fabricate at least some of the proposed sensors. The nanogap sensors proposed herein may operate as molecular sensors to help identify chemical species through electrical measurements using at least a pair of electrodes separated by a nanogap.