Nanohole SPR Sensor-Chip Assembly for Accurate Low-Contamination Detection

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Solution Overview

Problem

Existing sensor-chips for detecting target substances using surface plasmon resonance techniques face challenges in sensitivity, particularly in detecting low-molecular-weight or small amounts of substances, and require complex manufacturing processes that are time-consuming and costly.

Innovation Solution

A sensor-chip assembly is developed with a chip body made of transparent quartz or glass material, featuring a metal layer and nanoholes, housed in a base with a fixing member and cover, allowing for low-touch handling and alignment, and utilizing surface plasmon resonance to enhance sensitivity and simplify manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional sensor-chip designs are used, then manufacturing processes become complex and time-consuming, but sensitivity to target substances deteriorates

Engineering Contradiction:
ImprovesensitivityVSAvoidmanufacturing process complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The sensor chip is divided into distinct functional layers: substrate layer, metal layer with nanohole array, and protective coating layer. Each layer is optimized independently for its specific function, allowing simplified manufacturing of each component while achieving high overall sensitivity through the segmented structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A nanohole array is formed in the metal layer, creating a porous structure that enhances sensitivity by increasing the effective surface area for target substance interaction. The nanoholes allow analytes to access the metal surface more efficiently, improving detection sensitivity without requiring complex manufacturing processes.

Inventive Principle:
Principle #31Porous materials

2Measurement precision

If conventional sensor-chip designs are used, then manufacturing time and cost increase, but detection accuracy improves

Engineering Contradiction:
Improvedetection accuracyVSAvoidmanufacturing time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

Multiple manufacturing steps are merged into a single photolithography process to create the nanohole array pattern. The photoresist coating, patterning, and etching are combined in one sequence, significantly reducing manufacturing time while maintaining high detection accuracy through precise nanohole formation.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The metal layer is deposited and patterned with nanoholes before final chip assembly and coating application. This preliminary preparation of the sensing surface allows for optimized target substance interaction from the start, ensuring high detection accuracy is achieved early in the manufacturing process rather than requiring additional time-consuming steps later.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If standard handling procedures are used, then contamination and interference increase, but ease of operation is reduced

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidhandling convenience
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

A thin protective coating layer is applied over the metal nanohole array, creating a protective shell that prevents contamination and interference during handling and operation. This protective film maintains measurement accuracy by blocking contaminants while allowing optical signals to pass through for detection, and it simplifies handling by providing a robust outer surface.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The protective coating acts as an intermediary layer between the sensitive metal nanohole array and the external environment. It mediates the interaction by blocking harmful contaminants and interference while permitting the necessary optical signals to reach the sensing surface, thus maintaining measurement accuracy without complicating handling procedures.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor-chip assembly improves sensitivity to target substances by minimizing contamination and interference, enabling accurate, repeatable measurements with reduced manufacturing time and cost, and allows for real-time analysis without damaging the substances.

Implementation Method 1

Surface plasmon resonance (SPR) techniques can be utilized in various industrial fields as means for detecting target substances. Under conditions where a wave vector component of the incident light is parallel with the thin metal film and is the same as the wave vector of surface plasmons most of the energy of the incident light is absorbed to the thin metal film, such that the charge density is at the interface where an analysis target substance is located.

Methodology Applied
Scientific EffectSurface plasmon resonance:

Data Source

PatentUS12498321B2Sensor-chip and manufacturing method thereof
Publication Date: 2025.12.16 KOREA ADVANCED INST OF SCI & TECH
  • US12498321B2 patent drawing
  • US12498321B2 patent drawing
  • US12498321B2 patent drawing

AI summary

Methods, systems, and apparatus, for a sensor-chip device for performing analysis on target substances. In one aspect, the sensor-chip assembly includes a chip body including a substrate, at least one metal layer formed on the substrate, and nanoholes formed in the metal layer, a base having an accommodating portion for accommodating the chip body, and a fixing member fixing the chip body accommodated in the accommodating portion by being coupled to the base.