Nanoimprint Curable Composition Marangoni Spreading

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional photo-nanoimprint technologies face challenges with long filling times, leading to low throughput and non-filling defects due to slow spread and fill processes.

Innovation Solution

A pattern forming method utilizing a curable composition with a higher surface tension component (e1) layered beneath a second curable composition (A2) with lower surface tension, allowing for rapid spreading and filling through the Marangoni effect, and subsequent curing with light irradiation to achieve a short filling time and high throughput.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a single curable composition is used in conventional photo-nanoimprint technology, then the process is simple, but the filling time is long and throughput is low

Engineering Contradiction:

ImprovethroughputVSAvoidfilling time

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The curable composition is divided into two separate compositions (A1 and A2) with different surface tensions. Composition A1 is applied first as a base layer, then composition A2 is applied as droplets. This segmentation allows each composition to perform its specific function optimally, with A2 providing rapid spreading due to its lower surface tension, thereby reducing filling time and improving throughput.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention changes the surface tension parameter by using two compositions with different surface tension values. Composition A1 has a higher surface tension while composition A2 has a lower surface tension. This parameter difference drives the Marangoni effect, enabling rapid spreading and filling of the composition into the mold grooves, thus reducing filling time and increasing productivity.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If conventional single-composition method is used, then material application is simple, but non-filling defects occur due to slow spread and fill processes

Engineering Contradiction:

Improvepattern formation qualityVSAvoidspread and fill time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

By changing the surface tension parameter through the use of two different compositions, the invention enables rapid spreading and filling. Composition A2 with lower surface tension spreads quickly and fills mold grooves rapidly, preventing non-filling defects while maintaining high pattern formation quality. The different surface tension values create the Marangoni effect that drives this rapid filling process.

Inventive Principle:

Principle #35Parameter changes

3Manufacturing precision

If droplets of curable composition are dispensed discretely, then pattern precision can be achieved, but the droplets spread slowly over the entire gap region

Engineering Contradiction:

Improvepattern precisionVSAvoidspreading speed

Core Design Contradiction:

Manufacturing precisionVSSpeed

Solution Approach 1:

The invention changes the surface tension parameter by using composition A2 with lower surface tension for the discrete droplets. This lower surface tension enables the droplets to spread rapidly across the gap region while maintaining their discrete pattern. The Marangoni effect driven by surface tension difference between A1 and A2 accelerates the spreading process, achieving both pattern precision and high spreading speed.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method significantly reduces filling time, enhancing throughput and minimizing non-filling defects, thereby improving productivity in pattern formation processes.

Implementation Method 1

a surface tension of a composition of components of the curable composition (A1) except a solvent being higher than a surface tension of a composition of components of the curable composition (A2) except a solvent

Methodology Applied

Scientific EffectMarangoni effect: Marangoni Effect

Implementation Method 2

a light irradiating step (4) of irradiation of the mixture layer with irradiation light 206 from the side of the mold 205 having a pattern to cure the layer

Methodology Applied

Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentUS10829644B2Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold

Publication Date: 2020.11.10 CANON KK

AI summary

A pattern is formed on a substrate with forming a layer of a curable composition (A1) containing a component (a1) serving as a polymerizable compound and a component (e1) on a surface of the substrate, then dispensing droplets of a curable composition (A2) containing at least a component (a2) serving as a polymerizable compound dropwise discretely onto the layer of the curable composition (A1), subsequently sandwiching a mixture layer of the curable composition (A1) and the curable composition (A2) between a mold and the substrate, then irradiating the mixture layer with light to cure the layer, and releasing the mold from the mixture layer after the curing, a surface tension of a composition of components of the curable composition (A1) except a solvent being higher than a surface tension a composition of components of the curable composition (A2) except a solvent.