Nanoimprint Template Control Switching for Partial Field Filling
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Solution Overview
Problem
Determining the predetermined distance for switching control during nanoimprint lithography to achieve good filling performance in partial and small partial fields is burdensome and inefficient.
Innovation Solution
A method is introduced where the template moves based on predetermined position information until a specific distance is reached, then switches to force control, adjusting the distance based on control parameters for optimal filling, without requiring extensive experimentation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If experimentation is performed to determine the predetermined distance for each unique partial field and small partial field, then good filling performance is achieved, but the process becomes burdensome and time-consuming
Solution Approach 1:
The patent applies parameter changes by adjusting the predetermined distance based on the size of the field being imprinted. Different fields (full fields, partial fields, small partial fields) use different predetermined distances, which are determined through a single experimentation process rather than individual experimentation for each field type. This resolves the contradiction by maintaining good filling performance while reducing the time required to determine the optimal distance.
Solution Approach 2:
The patent segments the field imaging process into different categories (full fields, partial fields, small partial fields) and applies different predetermined distances to each segment. This segmentation allows the system to optimize for each field type without requiring separate experimentation for every unique field, thereby reducing overall determination time while maintaining precision.
2Ease of operation
If a single predetermined distance is used for all fields, then the process is simple, but filling performance deteriorates for partial and small partial fields
Solution Approach 1:
The patent applies local quality by assigning different predetermined distances to different field types (full fields, partial fields, small partial fields). Each field type receives the specific distance optimization suited to its characteristics, thereby maintaining high filling performance while keeping the control mechanism relatively simple through categorical differentiation.
3Manufacturing precision
If experimentation is performed for each unique partial field, then optimal filling is achieved, but process complexity increases
Solution Approach 1:
The patent applies universality by creating a single experimentation process that determines predetermined distances for multiple field types (full fields, partial fields, small partial fields). This multi-functional approach allows the same experimentation framework to serve different field sizes, reducing the complexity that would otherwise arise from requiring separate experimentation for each unique field configuration.
Data Source
AI summary
An imprinting method includes moving a template having a shaping surface towards a substrate based on position information, upon reaching a first distance from the substrate, switching from moving the template based on position information to moving based on force information, contacting the shaping surface with formable material such that the total surface area of the shaping surface overlaps the substrate, moving the template towards the substrate based on position information, upon reaching a second distance from the substrate, switching from moving the template based on position information to moving based on force information, contacting, with the shaping surface, the formable material, wherein the shaping surface overlaps an edge of the substrate. The second distance is equal to the first distance adjusted based on at least one control parameter associated with contacting the formable material with the shaping surface when the shaping surface overlaps the edge of the substrate.