Photo-nanoimprint Curable Composition Mixing
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Solution Overview
Problem
The existing photo-nanoimprint technology faces challenges with long filling times and in-plane distribution issues due to insufficient mixing of curable compositions, leading to mechanical strength variations and pattern defects.
Innovation Solution
A method involving the use of two liquid curable compositions, where one composition contains a polymerizable compound and a photopolymerization initiator, applied in a specific layering and irradiation process to ensure efficient mixing and curing, with a Distance in Hansen space Ra between components of 6 or less, promoting uniform curing and reducing defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single liquid curable composition is used in photo-nanoimprint technology, then the process is simple, but the filling time is long and throughput is low
Solution Approach 1:
The single curable composition is segmented into two distinct compositions: a first liquid curable composition and a second liquid curable composition. The first composition is applied to the substrate and serves as the primary curable layer, while the second composition is contained in the mold and cures faster upon light irradiation. This segmentation allows the mold to be released more quickly after curing, thereby increasing throughput without significantly complicating the overall process.
2Device complexity
If curable compositions are not sufficiently mixed, then the process is simple, but in-plane distribution is poor and mechanical strength varies
Solution Approach 1:
The patent applies local quality by giving each curable composition distinct properties tailored to its specific role. The first liquid curable composition has properties optimized for substrate adhesion and pattern formation, while the second liquid curable composition has properties optimized for fast curing and mold release. This local differentiation ensures that each composition performs its function effectively without requiring extensive mixing, thereby maintaining uniform in-plane distribution and consistent mechanical strength.
3Reliability
If the Hansen space distance between polymerizable compounds is large, then composition compatibility is high, but mixing efficiency is low and defects increase
Solution Approach 1:
The patent optimizes the chemical parameters of the two liquid curable compositions by controlling the Hansen space distance between their polymerizable compounds to be 6 or less. This parameter optimization ensures sufficient compatibility between the compositions for effective mixing while preventing excessive mixing that would reduce the concentration of the photopolymerization initiator in the first composition. The result is efficient mixing with minimal pattern defects such as collapse or plug defects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in a high-throughput process with improved in-plane distribution, reduced defects, and enhanced mechanical strength of the cured film, ensuring efficient pattern formation with minimal collapse or plug defects.
Implementation Method 1
a component (b2) serving as a photopolymerization initiator... irradiating the mixture layer with light from the side of the mold to cure the layer
Implementation Method 2
sandwiching a mixture layer obtained by partially mixing the curable composition (A1) and the curable composition (A2)
Data Source
AI summary
A pattern is formed on a substrate with a layer of a curable composition (A1) containing a component (a1) serving as a polymerizable compound on a surface of the substrate, then dispensing droplets of a curable composition (A2) containing at least a component (a2) serving as a polymerizable compound and a component (b2) serving as a photopolymerization initiator dropwise discretely onto the curable composition (A1) layer to lay the droplets, subsequently sandwiching a mixture layer of the curable composition (A1) and the curable composition (A2) between a mold having a pattern and the substrate, then irradiating the mixture layer with light to cure the layer, and releasing the mold from the mixture layer after the curing, a Distance in Hansen space Ra((a1)−(A2)) between the component (a1) serving as a polymerizable compound in the curable composition (A1) and the curable composition (A2) being 6 or less.