Nanoimprint Gas Flow Control for Extrusion Prevention
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Solution Overview
Problem
In nanoimprint lithography, excess formable material extrudes from the template, leading to defects and reduced production yields due to curing and adhesion issues, which existing methods fail to effectively prevent or minimize.
Innovation Solution
A method involving the controlled flow of gases, such as oxygen, clean dry air, or helium, into specific regions around the template and substrate to reduce the partial pressure of the formable material, preventing its extrusion and curing by maintaining a vapor pressure equilibrium, thereby reducing extrusions and defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the formable material is pressed into the template during nanoimprint lithography, then the pattern is formed in the formable material, but excess formable material extrudes from the template edges causing defects
Solution Approach 1:
The patent introduces an inert gas atmosphere (such as nitrogen or oxygen) in the gap region between the template and substrate. This inert environment prevents the extruded formable material from curing by excluding oxygen or other reactive gases that would enable polymerization, thereby eliminating defects caused by cured extruded material while maintaining precise pattern formation
Solution Approach 2:
The patent uses a gas flow system as an intermediary medium between the extruded formable material and the surrounding environment. The gas flow controls the partial pressure of the formable material vapor and prevents curing reactions, acting as a protective barrier that allows excess material to be present without causing defects
2Manufacturing precision
If the extruded formable material is cured, then the pattern is complete, but the cured extruded material sticks to the template reducing template life
Solution Approach 1:
By maintaining an inert gas atmosphere in the gap region during and after the imprinting process, the patent prevents the extruded formable material from curing. This ensures that excess material remains uncured and can be easily removed from the template, thereby extending template life while maintaining complete pattern formation
Solution Approach 2:
The patent applies gas flow control before and during the curing process to prevent extruded material from curing in the first place. This preliminary preventive action eliminates the need for subsequent cleaning operations and extends template使用寿命 by preventing adhesion before it occurs
3Object-generated harmful factors
If gas flow is increased to reduce extrusions, then fewer defects occur, but the flow may interfere with material filling
Solution Approach 1:
The patent applies gas flow control locally in the gap region between the template and substrate, rather than throughout the entire processing chamber. This localized approach creates a controlled inert environment precisely where extruded material is present, preventing curing without interfering with the material filling process in the imprint region
Solution Approach 2:
The patent uses a moderate gas flow rate that is sufficient to prevent curing of extruded material in the gap region but not so strong as to interfere with material filling in the imprint region. This partial action approach targets only the problematic extruded material while leaving the filling process undisturbed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The controlled gas flow effectively reduces extrusions and adherences, enhancing template life and production yields by maintaining a stable vapor pressure and preventing material adhesion, thus improving the uniformity and quality of the nanoimprint process.
Implementation Method 1
The template and the flow of the second gas may be configured to reduce the partial pressure of the formable material below a vapor pressure of the formable material in a portion of the gap region adjacent to the fluid-gas interface at the imprint edge interface
Data Source
AI summary
A method, a system, and a controller for imprinting. Apply droplets of a formable material to imprint region of substrate. A partial pressure of formable material develops at a fluid-gas interface. A portion of an imprinting surface of a mesa on a template at an initial contact time is brought into contact with the droplets. The droplets merge and flow towards an imprint edge interface. A first gas flows in the imprint region prior to the initial contact time. A second gas flows into the imprint edge interface and region between the template and the substrate after the initial contact time. The template and the flow of the second gas reduces the partial pressure of the formable material below a vapor pressure of the formable material in a portion of the gap region adjacent to the fluid-gas interface at the imprint edge interface.