Nanoimprint Lithography Mold With Replaceable Plug Chip
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Solution Overview
Problem
Existing nanoimprint lithography methods lack a method to recover or repair replica molds damaged by scratches, dust, or contamination, and involve a two-step process to form the final replica mold.
Innovation Solution
A mold design comprising a base socket and a plug chip with an adhesive, where the plug chip can be replaced when damaged, allowing for the recovery of the mold by replacing only the plug chip, and using ultraviolet rays to harden the imprinted resin without interference from the adhesive.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If the replica mold is made of thermo-curable resin and used repeatedly, then the mold can be used for multiple productions, but the mold becomes damaged by scratches, dust, and contamination without any repair method
Solution Approach 1:
The mold is divided into two separate components: a base socket and a plug chip. The plug chip containing the fine patterns can be detached and replaced when damaged, while the base socket remains. This segmentation enables repair by replacing only the damaged plug chip rather than the entire mold, thus maintaining reliability while extending usage duration.
2Manufacturing precision
If a two-step process is used to form the replica mold (first optically curable resin, then thermo-curable resin), then the final replica mold can be obtained, but the process becomes complex and time-consuming
Solution Approach 1:
The complex two-step mold formation process is extracted and replaced by using only the optically curable resin step. The plug chip with pre-formed fine patterns is directly pressed into the optically curable resin, eliminating the need for the subsequent thermo-curable resin step while maintaining manufacturing precision.
3Strength
If adhesive is used to glue the plug chip to the base socket, then the plug chip is secured in place, but the adhesive may interfere with ultraviolet rays needed to harden the imprinted resin
Solution Approach 1:
The adhesive is applied only in the peripheral region of the plug chip, while the central region containing the fine patterns remains free of adhesive. This local quality approach ensures strong attachment at the edges while maintaining ultraviolet ray transparency in the center, preventing interference with the hardening process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the precise and efficient recovery of the mold by replacing the plug chip, maintaining the integrity of the fine patterns and preventing adhesive interference with ultraviolet rays, thus extending the life of the mold and ensuring consistent nanoimprint lithography results.
Implementation Method 1
The adhesive put between the back surface of the plug chip and a bottom of the pocket glues the plug chip to the base socket
Implementation Method 2
the nanoimprint lithography using the ultraviolet rays to harden the imprinted resin by irradiating the imprinted resin with the ultraviolet rays through the base socket and the plug chip
Data Source
AI summary
A mold for the nanoimprint lithography and a method for forming the mold are disclosed. The mold comprises a base socket, a plug chip and an adhesive. The plug chip provides a fine pattern to be transcribed in a top surface thereof. The base socket provides a pocket within which the plug chip is set such that the top surface thereof is pushed out from the top surface of the base socket.