Nanoimprint Template Layout for Precise Alignment Mark Detection
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Solution Overview
Problem
Existing nanoimprint lithography (NIL) techniques face challenges in achieving high-precision alignment due to misalignment of the optical layer during template manufacturing, leading to reduced precision in pattern transfer processes.
Innovation Solution
A template design with specific recess and protrusion patterns, including an optical layer only in certain recess portions, ensures precise alignment by preventing unintended optical layer displacement, maintaining alignment accuracy during pattern transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the optical layer is formed in all recess portions to improve alignment detection, then the alignment mark visibility is enhanced, but the optical layer may be misplaced to the protruding portions causing alignment errors
Solution Approach 1:
The template surface is segmented into different regions: first recess portions (where optical layer is formed), second recess portions (where optical layer is excluded), and first protruding portions. This segmentation allows the optical layer to be selectively formed only in appropriate regions, preventing misplacement while maintaining alignment detection precision.
Solution Approach 2:
Different regions of the template are given different properties: the first recess portions have optical layer coverage for alignment detection, while the second recess portions and protruding portions deliberately exclude the optical layer. This local differentiation ensures the optical layer remains in correct positions and prevents unwanted optical effects from protruding portions.
2Measurement precision
If the optical layer is completely removed from protruding portions to prevent stray light, then alignment accuracy is improved, but the structural integrity and pattern definition may be compromised
Solution Approach 1:
The template is divided into functional zones: alignment mark regions (with optical layer in recess portions for detection), pattern transfer regions (protruding portions without optical layer for pattern definition), and excluded regions (second recess portions without optical layer). This segmentation allows each region to fulfill its specific function without interference.
Solution Approach 2:
The optical layer is extracted or removed from specific regions (protruding portions and second recess portions) where it would cause harmful effects like stray light or alignment errors, while being retained in first recess portions where it serves the alignment detection function. This selective extraction resolves the contradiction between preventing stray light and maintaining structural integrity.
Data Source
AI summary
According to one embodiment, a template includes a base material with a first surface at a first level. A first pattern on the template includes first protruding portions in a first region that protrude to a second level beyond the first level, a first recess portion between an adjacent pair of first protruding portions in a central portion of the first region, and a second recess portion between another adjacent pair of first protruding portions in an outer peripheral portion of the first region. A second pattern on the template includes a protrusion portion in a second region outside the first region. The protrusion portion protrudes to a third level. An optical layer is in the first recess portion and at least a portion of a bottom surface of the second recess portion is not covered by the optical layer.