Nanoimprint Template Segmentation for Pattern Accuracy

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Solution Overview

Problem

Current nanoimprint lithography (NIL) methods face challenges in achieving high accuracy for fine pattern formation due to issues with imprint material distribution and air bubbles, leading to decreased processing accuracy and throughput in semiconductor device manufacturing.

Innovation Solution

A template with a specific structure, including a convex-concave portion and an optical layer, is used in conjunction with a pattern formation method that restricts the contact of the imprint material with certain regions, preventing air bubbles and ensuring accurate pattern transfer by controlling the curing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional NIL methods are used for fine pattern formation, then the process can be performed, but manufacturing precision deteriorates due to imprint material distribution issues and air bubbles

Engineering Contradiction:

Improvepattern formation accuracyVSAvoidprocessing accuracy

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The template is divided into a first region with a convex-concave portion for pattern formation and a second region with a protruding portion that restricts imprint material contact. This segmentation prevents air bubbles and material drawing, ensuring reliable pattern transfer and improving manufacturing precision.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The protruding portion in the second region acts as an intermediary structure between the template and the coating layer. It restricts the contact between the imprint material and the template surface, preventing air bubble formation and material drawing while allowing controlled pattern transfer.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If the template structure is simplified, then device complexity is reduced, but manufacturing precision deteriorates due to inability to control imprint material distribution

Engineering Contradiction:

Improvepattern formation accuracyVSAvoidtemplate structure complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The template is segmented into functional regions: the first region with convex-concave portions for pattern formation and the second region with protruding portions for material restriction. This segmentation achieves precise pattern formation without requiring overly complex overall template structures.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the template are given different local structures and functions. The first region has convex-concave portions for pattern transfer, while the second region has protruding portions for restricting material contact. This local differentiation achieves high precision without uniform complexity throughout the entire template.

Inventive Principle:

Principle #3Local quality

3Manufacturing precision

If the coating layer is allowed to contact the entire template surface, then ease of operation is improved, but manufacturing precision deteriorates due to depression formation and material drawing

Engineering Contradiction:

Improvecoating layer thickness uniformityVSAvoidtemplate contact requirement

Core Design Contradiction:

Manufacturing precisionVSEase of operation

Solution Approach 1:

The protruding portions in the second region serve as intermediary structures that control the contact between the coating layer and the template. They allow the coating layer to contact the template in a controlled manner, preventing material drawing and depression formation while maintaining ease of operation.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The protruding portions extract or remove the problematic contact areas from the template surface. By having the coating layer contact only the appropriate regions (first region) and not the entire template surface, the design eliminates depression formation and material drawing issues.

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the formation of precise device patterns with reduced depression formation and improved accuracy, enhancing the semiconductor device manufacturing process by preventing material drawing and maintaining the desired thickness of the coating layer.

Implementation Method 1

an optical layer provided on the second face and the second pattern

Methodology Applied

Scientific EffectLight blocking: Absorption (EM radiation)

Data Source

PatentUS12085853B2Template, pattern forming method, and semiconductor device manufacturing method

Publication Date: 2024.09.10 KIOXIA CORP

AI summary

A template includes a first region having a first face on a side opposite to a main face and a first pattern including a convex-concave portion provided on the first face, and a second region, provided around the first region, having a second face on the side opposite to the main face, a second pattern including a protruding portion protruding from the second face, and an optical layer provided on the second face and the second pattern, wherein the second face is positioned farther to the main surface side than a bottommost face of the irregular portion.