Nanoimprint Template Separation via Controlled Bending and Back Pressure
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Solution Overview
Problem
Nanoimprint lithography processes face challenges with separation defects, particularly last point of separation (LPOS) defects, due to uncontrolled separation conditions that result in sudden and uncontrolled separation processes, leading to pattern defects and device failures.
Innovation Solution
A method involving the application of a tensional force to create bending in the template and substrate, followed by measuring and counteracting the stored energy with back pressure to control the separation process, ensuring a low and controlled tensional force throughout the separation, using a system with a force detection system and pressure control to iteratively adjust the separation force and back pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional separation methods are used, then the template can be separated from the substrate, but sudden and uncontrolled separation occurs causing LPOS defects
Solution Approach 1:
The patent implements a feedback control system where a force detection system continuously monitors the separation force in real-time, and a control system adjusts the separation process based on this feedback to maintain force within a predetermined range, preventing sudden separation and LPOS defects
Solution Approach 2:
The patent transforms the static separation process into a dynamic controlled process by continuously monitoring separation force and adjusting parameters in real-time, allowing the system to adapt to changing conditions during separation and maintain control throughout the process
2Productivity
If high separation force is applied, then the template separates from the substrate, but feature elongation and collapse occur
Solution Approach 1:
The patent changes the parameter of separation force from high to low by maintaining force within a predetermined low range through feedback control, which prevents feature elongation and collapse while still achieving complete separation through controlled accumulation of small force applications
3Loss of time
If uncontrolled separation process is used, then separation is achieved quickly, but separation defects are generated
Solution Approach 1:
The patent uses real-time force detection and feedback control to monitor and adjust the separation process, ensuring that separation occurs under controlled conditions throughout the entire process, which prevents defects while maintaining efficiency through automated control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach minimizes or eliminates LPOS defects by maintaining a controlled separation process with reduced tensional force, preventing feature elongation and collapse, thereby ensuring the integrity of the pattern and reducing device defects.
Implementation Method 1
measuring the tensional force applied to the template and the substrate
Implementation Method 2
applying the determined amount of pressure to the backsides of the template and the substrate
Implementation Method 3
The applied tensional force induces a bending of the template or the substrate and such bending further creates stored energy in the template or the substrate
Data Source
AI summary
An apparatus is described for separation of a nanoimprint template from a solidified patterned layer on a substrate that minimize separation defects, including last point of separation (LPOS) defects. The apparatus is configured to move the template and substrate relative to one another and determining an amount of pressure to apply to the backsides of the template and the substrate.