Nanoimprinting Liquid Storage with Sorption Medium
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In the photonanoimprinting technique, the concentration of particles, metal impurities, and water in the nanoimprinting liquid increases over time when stored in a liquid ejection device, leading to mold damage and defects in the formed patterns, contamination of semiconductor substrates, and reduced curing properties.
Innovation Solution
A liquid ejection device with a storage section containing a sorption medium that absorbs or adsorbs particles, metal ions, and water, preventing them from being ejected and maintaining low concentrations within the nanoimprinting liquid.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the nanoimprinting liquid is stored in a storage section of a liquid ejection device, then the liquid can be supplied and ejected on demand, but the concentration of particles, metal impurities, and water increases over time
Solution Approach 1:
A sorption medium is introduced as an intermediary substance within the storage section to selectively adsorb particles, metal impurities, and water from the nanoimprinting liquid. This mediator maintains liquid purity without interfering with the ejection function, resolving the contradiction between continuous storage and purity maintenance.
Solution Approach 2:
The storage section is designed with non-uniform properties by incorporating a sorption medium that creates localized purification zones. Different regions of the storage section have different functional qualities: the sorption medium regions actively remove impurities while other regions maintain liquid flow, enabling simultaneous storage and purification.
2Duration of action of stationary object
If particles are present in the nanoimprinting liquid, then the liquid can be stored for extended periods, but the mold is damaged and formed patterns have defects
Solution Approach 1:
The sorption medium converts the harmful presence of particles into a beneficial purification process. By intentionally introducing a substance that selectively binds to particles, metal impurities, and water, the system transforms potential contaminants into removable complexes, extending storage duration without compromising pattern quality.
3Ease of operation
If metal impurities are present in the nanoimprinting liquid, then the liquid can be stored without special handling, but semiconductor substrates are contaminated
Solution Approach 1:
The storage section performs self-purification through the sorption medium, which automatically adsorbs metal impurities from the nanoimprinting liquid without requiring external intervention. This self-service mechanism maintains substrate compatibility while preserving ease of operation, as the purification occurs passively during storage.
4Duration of action of stationary object
If water is present in the nanoimprinting liquid, then the liquid can be stored in standard conditions, but curing properties are reduced
Solution Approach 1:
The sorption medium acts as an intermediary that selectively binds water molecules from the nanoimprinting liquid during storage. This mediator maintains the water-sensitive curing properties of the liquid while allowing long-term storage under standard conditions, as the water concentration is continuously controlled by the sorption medium.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sorption medium effectively suppresses the increase in particle, metal impurity, and water concentrations, enhancing the yield of photonanoimprinting processes and ensuring high-quality semiconductor device fabrication by preventing mold damage and maintaining optimal curing properties.
Implementation Method 1
The storage section contains a sorption medium that adsorbs or absorbs at least one selected from the group consisting of particles, metal ions, and water
Implementation Method 2
The storage section contains a sorption medium that adsorbs or absorbs at least one selected from the group consisting of particles, metal ions, and water
Data Source
AI summary
A liquid ejection device includes a storage section storing a nanoimprinting liquid and also includes an ejection port which communicates with the storage section and which ejects the nanoimprinting liquid. The storage section contains a sorption medium that adsorbs or absorbs at least one selected from the group consisting of particles, metal ions, and water. The sorption tedium is not ejected from the ejection port when the nanoimprinting liquid is ejected from the ejection port.