Nanomanipulator Sample Stabilization via Stage V-Groove
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Solution Overview
Problem
Current methods for processing and analyzing microscopic samples in charged-particle instruments, such as FIB and SEM, require attaching samples to a secondary support after lift-out, which introduces unnecessary drift and vibration, consuming valuable instrument time and compromising imaging quality.
Innovation Solution
The method involves stabilizing the sample on the nanomanipulator end-effector by gently pushing it against a support structure fixed to the microscope stage until no vibration is detected, allowing for accurate processing and analysis without the need for a secondary holder.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the sample is attached to a secondary support after lift-out, then the sample stability against drift and vibration is improved, but the instrument time is consumed and imaging quality is compromised
Solution Approach 1:
The patent extracts the stabilizing function from the secondary support and integrates it directly into the microscope stage through a V-groove feature. This eliminates the need for separate secondary support attachment while maintaining sample stability during processing and analysis.
Solution Approach 2:
The patent merges the sample stabilization function with the microscope stage by incorporating a V-groove directly into the stage structure. This combines the stage's positioning function with the support's stabilizing function, eliminating the need for separate secondary supports and reducing instrument time.
2Ease of operation
If the sample is attached to a secondary support, then the handling ease for storage and transfer is improved, but the device complexity and processing time are increased
Solution Approach 1:
The patent removes the secondary support component entirely by extracting its stabilizing function and integrating it into the microscope stage's V-groove feature, thereby reducing device complexity while maintaining handling capability.
Solution Approach 2:
The microscope stage is designed with multi-functionality, serving both as the positioning platform and as the sample support structure through its integrated V-groove feature, eliminating the need for separate secondary supports.
3Productivity
If processing and analysis are performed while the sample is held by the end-effector, then the need for additional handling steps is reduced, but the drift and vibration from the nanomanipulator interfere with imaging quality
Solution Approach 1:
The V-groove acts as an intermediary stabilizing structure that receives the sample from the nanomanipulator end-effector and provides a stable reference frame for processing and analysis, mediating between the movable end-effector and the stationary microscope stage.
Solution Approach 2:
The microscope stage's V-groove provides self-service stabilization by automatically stabilizing the sample through gentle contact without requiring additional active stabilization systems or secondary supports, enabling direct processing and analysis.
Data Source
AI summary
A method for processing a sample in a charged-particle beam microscope. A sample is collected from a substrate and the sample is attached to the tip of a nanomanipulator. The sample is optionally oriented to optimize further processing. The nanomanipulator tip is brought into contact with a stabilizing support to minimize drift or vibration of the sample. The attached sample is then stabilized and available for preparation and analysis.