Nanomechanical Mass Flow Meter for Open Nanofluidic Systems

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Solution Overview

Problem

Current open nanofluidic systems face challenges in achieving precise quantitative control of liquid transport due to limitations in real-time mass flow measurement and control.

Innovation Solution

A nanomechanical mass flow meter and controller device utilizing a mechanical resonator sensor with a cantilever or nanowire resonator to measure and control mass flow in open nanofluidic systems by monitoring mechanical spectra and adjusting liquid deposition through voltage application.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If open nanofluidic systems are used for liquid transport, then hydrodynamic resistance is reduced and gas bubble elimination is improved, but precise quantitative control of liquid transport is limited due to difficulty in providing precise flow measurements

Engineering Contradiction:
Improveliquid transport control precisionVSAvoidmass flow measurement capability
Core Design Contradiction:
ReliabilityVSDifficulty of detecting and measuring

Solution Approach 1:

The patent replaces conventional volumetric measurement methods with a nanomechanical resonator-based mass measurement system. The resonator detects mass flow directly through frequency shifts caused by mass loading, enabling precise quantitative control in open nanofluidic systems without relying on volume change estimations or imaging techniques

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a conducting liquid intermediary that couples the mechanical resonator to the liquid flow. This conducting liquid allows the resonator to detect mass flow through electromagnetic coupling while maintaining the open system architecture, bridging the gap between mechanical sensing and fluid transport control

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If imaging techniques are used for flow measurements, then volume changes of liquid droplets can be estimated, but accuracy is limited and the method is useless for compact integrated devices

Engineering Contradiction:
Improveflow measurement accuracyVSAvoiddevice integration capability
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces complex imaging systems with a simple nanomechanical resonator that directly measures mass flow through frequency shifts. This mechanical-to-electrical measurement conversion eliminates the need for external imaging equipment, achieving high accuracy while enabling compact integrated device design

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent extracts the measurement function from external imaging systems and integrates it directly into the nanofluidic device through the nanomechanical resonator. This extraction of the sensing function enables self-contained, compact integrated devices with high measurement precision

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device enables real-time, precise measurement and control of mass flow, overcoming previous limitations in accuracy and enabling the development of compact integrated devices for open nanofluidic systems.

Implementation Method 1

a mechanical resonator sensor comprising receiving means adapted for receiving a mass of conducting liquid disposed thereon, wherein said mechanical resonator sensor possesses at least one mechanical vibration mode selectable in one or more working frequencies; monitoring means adapted for monitoring the mechanical spectra of the coupled system conformed by the mass of conducting liquid and the mechanical resonator sensor

Methodology Applied
Scientific EffectMechanical resonance: Resonance

Implementation Method 2

dispensing means adapted for dispensing the mass of conducting liquid contained in the reservoir on the receiving means, through the application of a voltage between the reservoir and the receiving means

Methodology Applied
Scientific EffectElectrostatic deposition: Electrostatic Deposition

Data Source

PatentEP4336151B1Nanomechanical mass flow meter and controller device, method, and associated uses thereof
Publication Date: 2025.01.29 CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS (CSIC)
  • EP4336151B1 patent drawingFigure 1~2
  • EP4336151B1 patent drawingFigure 3A~3C
  • EP4336151B1 patent drawingFigure 4a~4b

AI summary

The present invention relates to a nanomechanical mass flow meter and controller device for open nanofluidic systems. Said device is based on the integration of semiconductor nanowires, either as open nanofluidic channels or as mass flow meters. Thanks to this configuration, the flow of conducting liquids along the surface of a semiconductor nanowire can be characterized at room conditions by applying a small bias voltage between the nanowire and a conductive support that sustains an ionic liquid reservoir droplet. Around 2-3 V, the conducting liquid can be made to flow steadily along the nanowire with both great degree of control and high flow rate measurement sensitivity. This technology opens unprecedented perspectives for the development of open nanofluidic applications, for which although several mechanisms to induce liquid flow have been explored, a technology that provides accurate real-time measurements of mass flow had never been proven.