3D Nanometer Filter Substrate with Selectable Slot Sizes
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Solution Overview
Problem
Current fluid filtration technologies face challenges in effectively removing particulate matter at the nanometer scale, particularly in achieving precise control over filter slot sizes and maintaining filter efficiency and reusability.
Innovation Solution
The development of a three-dimensional nanometer filter substrate comprising a base material with alternating layers of sacrificial and structural materials, where the sacrificial layers are etched to create filter slots and channels, allowing for selectable slot sizes based on sacrificial material thickness, and the use of porous materials for enhanced filtration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional filtration technologies are used, then filtration function is provided, but precise control over filter slot sizes at nanometer scale is not achieved
Solution Approach 1:
The filter substrate is divided into alternating layers of sacrificial material and structural material, with each layer contributing to the final slot geometry. This segmentation enables precise control of slot dimensions by independently controlling the thickness of each deposited layer, achieving nanometer-scale manufacturing precision through cumulative layer thickness control.
Solution Approach 2:
The invention transitions from two-dimensional filtration surfaces to three-dimensional structured substrates with vertical layering. By depositing alternating layers in the vertical dimension and then selectively removing sacrificial material, the process achieves precise slot size control that cannot be obtained with conventional planar filtration methods.
2Reliability
If filter efficiency is increased for nanometer particulate removal, then filtration performance improves, but filter reusability and cleanability deteriorate
Solution Approach 1:
The filter substrate incorporates porous layers that provide high surface area and interconnected pore structures for effective nanometer particulate removal. The porous architecture maintains open pathways that prevent clogging and facilitate thorough cleaning, enabling both high filtration efficiency and reusability through multiple cleaning cycles.
Solution Approach 2:
The sacrificial material layers are temporarily discarded during manufacturing to create the final slot structure, but the structural material layers are designed to be recovered and reused. The robust structural framework withstands repeated cleaning processes, allowing the filter to be recovered and reused multiple times while maintaining filtration efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient removal of particulate matter in the single-digit nanometer range, with the ability to clean and reuse filters, suitable for various applications including water treatment, gas processing, and air purification.
Implementation Method 1
etching removes the layers of sacrificial material between the layers of structural material to form filter slots in the filter sidewalls
Implementation Method 2
the continuous filter sidewall being fabricated from a porous material such that fluid entering the inlet sections passes through the continuous filter sidewall to remove particulates
Data Source
AI summary
Three dimensional nanoparticle filters are provided herein. In one embodiment a filter device includes a base material, alternating layers of sacrificial material between layers of structural material being deposited onto the base material to create a layered base material, and filter sidewalls etched into the deposited alternating layers of the layered base material to remove the layers of sacrificial material between the layers of structural material to form filter slots in the filter sidewalls as well as create channels between the filter sidewalls, where a size of the filter slots is selectable based on a thickness of the layers of sacrificial material utilized.


