Nanoparticle Bonding for Low-Temperature Flip-Chip Interconnects

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Solution Overview

Problem

The challenge in microelectronic packaging is the difficulty in achieving uniform and reliable flip-chip interconnections due to the small size and high density of chip contacts, which leads to issues with solder joint reliability and stand-off height, as well as the complexity of forming uniform metal columns or bumps over large areas.

Innovation Solution

A method involving the formation of conductive nanoparticles by electroless or electrolytic plating, which are then used to create metallurgical joints between conductive elements on substrates, allowing for the formation of conductive columns or structures with varying heights and shapes to accommodate non-coplanarity and improve thermal expansion compatibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If solder volume is reduced due to increased contact density, then contact pitch is reduced and chip density is improved, but solder joint reliability deteriorates as the entire volume may convert to brittle inter-metallic compounds

Engineering Contradiction:
Improvecontact pitchVSAvoidsolder joint reliability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent changes the material parameters of the bonding agent by using metal nanoparticles with controlled size distribution, melting points, and reactive properties. This allows achieving reliable joints at lower temperatures with smaller volumes, resolving the contradiction between reduced solder volume and maintained joint reliability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material systems combining metal nanoparticles with organic vehicles or matrices. This composite approach provides both the mechanical fill function and the controlled metallurgical bonding, improving reliability while accommodating high contact density

Inventive Principle:
Principle #40Composite materials

2Length of moving object

If stand-off height is reduced due to smaller solder joints, then manufacturing is simplified, but the ability to form proper underfill and accommodate thermal expansion deteriorates

Engineering Contradiction:
Improvestand-off heightVSAvoidthermal expansion compensation
Core Design Contradiction:
Length of moving objectVSAdaptability or versatility

Solution Approach 1:

The patent segments the bonding function into multiple components: metal nanoparticles for metallurgical bonding, organic vehicles for gap filling and underfill formation, and optional fluxes for contamination control. This segmentation allows each component to optimize its function independently, maintaining thermal expansion compensation capability even at reduced stand-off heights

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent modifies the rheological and thermal parameters of the bonding material system to enable proper underfill formation and thermal stress management at smaller stand-off heights, maintaining adaptability while reducing overall height

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If conventional electroplating is used to form metal columns, then conductive structures are created, but uniformity across large substrate areas deteriorates due to process variability

Engineering Contradiction:
Improveconductive structure formationVSAvoidcolumn uniformity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent employs self-service mechanisms where metal nanoparticles automatically distribute and organize themselves on the substrate surface through capillary action, surface tension, and controlled evaporation. This self-organizing behavior eliminates the need for complex electroplating control systems, achieving uniformity across large areas through material behavior rather than process control

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent introduces organic vehicles or matrices as intermediary materials that facilitate uniform nanoparticle distribution and deposition. These intermediaries act as carriers that control nanoparticle placement, ensuring uniformity across large substrate areas while simplifying the manufacturing process

Inventive Principle:
Principle #24Intermediary (Mediator)

4Strength

If joining temperature is elevated to form metallurgical joints, then bond strength is improved, but thermal stress and risk of damage to sensitive components increases

Engineering Contradiction:
Improvebond strengthVSAvoidthermal stress
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The patent fundamentally changes the temperature parameter by using metal nanoparticles with low melting points (such as tin, indium, or their alloys) that enable metallurgical bonding at temperatures below 150°C. This parameter change achieves strong bonds while minimizing thermal stress and preventing damage to temperature-sensitive electronic components

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses composite material systems combining low-melting-point metal nanoparticles with organic vehicles designed to remain stable at the bonding temperature. This composite approach enables strong metallurgical joints at low temperatures while the organic matrix provides structural support and stress distribution, reducing overall thermal stress on the assembly

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the formation of reliable and uniform electrical connections with reduced thermal stress and improved mechanical integrity, enhancing the efficiency and yield of microelectronic assembly processes while reducing fabrication costs.

Implementation Method 1

forming conductive nanoparticles at a surface of the conductive element by exposure to an electroless plating bath

Methodology Applied
Scientific EffectElectroless plating: Electroplating

Implementation Method 2

forming conductive nanoparticles at a surface of a first conductive element at a first surface of a substrate of a first component by exposing the first conductive element to an electrolytic bath

Methodology Applied
Scientific EffectElectrolytic plating: Electroplating

Implementation Method 3

elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles cause metallurgical joints to form

Methodology Applied
Scientific EffectSintering: Sintering

Implementation Method 4

the conductive nanoparticles cause metallurgical joints to form between the juxtaposed first and second conductive elements

Methodology Applied
Scientific EffectMetallurgical bonding: Welding

Data Source

PatentUS11973056B2Methods for low temperature bonding using nanoparticles
Publication Date: 2024.04.30 ADEIA SEMICON TECH LLC
  • US11973056B2 patent drawing
  • US11973056B2 patent drawing
  • US11973056B2 patent drawing

AI summary

A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.