Nanoparticle Coating Apparatus with Speed Adjustment for ALD Uniformity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current methods for manufacturing core-shell nanoparticles result in irregular particle sizes due to incomplete surface reaction termination, making it challenging to achieve high uniformity and productivity suitable for mass production, while also being costly and inefficient.
Innovation Solution
An apparatus using atomic layer deposition with a coating chamber equipped with speed adjustment members and a gas supply system that alternately supplies precursors to control the coating process, ensuring uniform thin film deposition and high purity nanoparticles, and includes a particle supply and low-pressure forming system to manage particle flow and pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional particle coating process is used, then coating can be performed, but particle size becomes irregular and uniformity decreases
Solution Approach 1:
The coating process is segmented into distinct sequential steps (precursor1 supply -> precursor2 supply -> purge) with precise timing control. Each step is independently controlled to ensure complete reaction termination before the next step begins, preventing particle size irregularity while maintaining productivity through optimized cycle times.
Solution Approach 2:
The reaction termination is ensured by preliminary purging action between coating cycles. The system performs a dedicated purge step that removes unreacted precursors and byproducts before the next coating cycle begins, preventing carryover effects that would cause particle size variation.
2Manufacturing precision
If reaction time is extended to ensure complete termination, then particle uniformity improves, but productivity decreases
Solution Approach 1:
The system uses timed feedback control where each process step (precursor supply, reaction, purge) has precisely defined duration based on reaction kinetics. The controller monitors and adjusts the timing of each step to ensure complete reaction termination while minimizing total cycle time, achieving both uniformity and productivity.
Solution Approach 2:
The coating process uses dynamic timing adjustment where reaction time, purge time, and precursor supply time are optimized based on real-time process conditions. This allows the system to achieve complete reaction termination with minimum necessary time, preventing over-coating while maintaining productivity.
3Manufacturing precision
If simple coating apparatus is used, then cost is reduced, but coating uniformity and purity decrease
Solution Approach 1:
The coating apparatus integrates multiple functions into a single unified system: particle introduction, precursor supply, reaction control, purging, and particle collection all occur within one reactor chamber. This multi-functional design achieves high coating uniformity and purity without requiring multiple separate equipment pieces, balancing performance with reasonable complexity.
Solution Approach 2:
The system uses a carrier gas as an intermediary to transport precursors uniformly throughout the reactor chamber and to facilitate heat and mass transfer during the coating process. This intermediary enables consistent coating uniformity while maintaining a relatively simple apparatus structure without requiring complex delivery systems.
4Productivity
If precursor supply speed is increased to improve productivity, then coating thickness control precision decreases
Solution Approach 1:
The precursor supply is performed in periodic alternating cycles: precursor1 is supplied for a defined time, then purged, then precursor2 is supplied for a defined time, then purged. This periodic action ensures that each precursor reacts completely before the next is introduced, maintaining precise thickness control while achieving high productivity through optimized cycle frequencies.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves high uniformity and small deviation in nanoparticle sizes, improving the productivity of the coating process and reducing costs by ensuring precise control over the coating thickness and process stability, making it suitable for mass production.
Implementation Method 1
a moving speed of the nanoparticles is decreased due to flow resistance or collision of the nanoparticles passing through the speed adjustment member
Implementation Method 2
a moving speed of the nanoparticles is decreased due to flow resistance or collision of the nanoparticles passing through the speed adjustment member
Implementation Method 3
a gas supply means configured to supply a carrier gas and a reactive gas serving as a source of a shell material into the process passage
Implementation Method 4
a low pressure forming means configured to form a low pressure in the process passage
Implementation Method 5
an apparatus for coating nanoparticles having a core-shell structure using atomic layer deposition
Data Source
AI summary
Disclosed is a coating chamber having a process passage in which a coating process is performed, a particle supply means configured to supply nanoparticles into the process passage, a gas supply means configured to supply a carrier gas and a reactive gas serving as a source of a shell material into the process passage, and a low pressure forming means configured to form a low pressure in the process passage. The coating chamber has a speed adjustment member formed of a porous material or a grid and installed in the process passage, and as a moving speed of the nanoparticles is decreased due to flow resistance or collision of the nanoparticles passing through the speed adjustment member, first and second precursors supplied as the reactive gas move more rapidly than the nanoparticles to coat a thin film on the nanoparticles with the material.