Nanoparticle Sample for 3D Shape Measurement

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Solution Overview

Problem

Current methods for measuring the three-dimensional shape of nanoparticles suffer from reproducibility issues and fail to accurately capture the shape of non-spherical particles due to probe shape effects and aggregation, leading to incomplete information on particulate species.

Innovation Solution

A method involving a substrate with isolated nanoparticles and standard nanoparticles disposed nearby, allowing for simultaneous measurement and correction of probe shape effects, enabling accurate three-dimensional shape analysis and species evaluation by using scanning probe or charged particle beam microscopy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional measurement methods using SPM or charged particle microscopes are employed, then three-dimensional shape information can be obtained, but measurement reproducibility deteriorates due to probe shape effects and aggregation

Engineering Contradiction:
Improvethree-dimensional shape measurement accuracyVSAvoidmeasurement reproducibility
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent applies preliminary action by preparing a substrate with isolated nanoparticles and standard nanoparticles disposed nearby before measurement. This pre-arranged configuration allows the probe shape effects to be identified and corrected using the standard nanoparticles, thereby improving measurement reproducibility while maintaining three-dimensional shape measurement accuracy.

Inventive Principle:
Principle #10Preliminary action

2Measurement precision

If standard nanoparticles are disposed nearby on the same substrate, then probe shape effects can be corrected simultaneously, but sample preparation complexity increases

Engineering Contradiction:
Improveprobe shape effect correction accuracyVSAvoidsample preparation complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent merges the measurement of standard nanoparticles and target nanoparticles into a single measurement process by disposing both types of particles on the same substrate. This combination allows simultaneous identification and correction of probe shape effects, improving measurement precision while the standardized preparation protocol actually reduces overall complexity compared to separate measurements.

Inventive Principle:
Principle #5Merging (Combining)

3Quantity of substance

If nanoparticles are dispersed in solution and dropped onto substrate, then particle distribution can be achieved, but aggregation occurs leading to loss of information on particulate species

Engineering Contradiction:
Improvenanoparticle distributionVSAvoidparticulate species information
Core Design Contradiction:
Quantity of substanceVSLoss of information

Solution Approach 1:

The patent applies local quality by creating specific local environments on the substrate that prevent aggregation. The substrate is designed with properties that promote isolated nanoparticle dispersion in certain regions, allowing each particle to maintain its individual characteristics and enabling accurate identification of particulate species without information loss.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances measurement reproducibility and accuracy, providing detailed information on particle size, distribution, and species characteristics, including aspect ratio, surface roughness, and phase differences.

Implementation Method 1

measuring the three-dimensional shape image of the silica nanoparticles by means of an atomic force microscope (AFM)

Methodology Applied
Scientific EffectScanning Probe Microscopy: Scanning Probe Microscopy

Implementation Method 2

charged particle microscopes (hereinafter, referred to as charged particle microscopes) as scanning probe microscopes (SPM) and scanning electron microscopes (SEM)

Methodology Applied
Scientific EffectCharged particle beam interaction: Electron Beam

Data Source

PatentUS10697767B2Sample for measuring particles, method for measuring particles and apparatus for measuring particles
Publication Date: 2020.06.30 HITACHI HIGH TECH CORP
  • US10697767B2 patent drawing
  • US10697767B2 patent drawing
  • US10697767B2 patent drawing

AI summary

To provide a sample for measuring particles enabling the three-dimensional particulate shape to be measured and the particulate species to be evaluated, the sample for measuring particles includes a substrate; isolated nanoparticles to be measured which are disposed on the substrate; and isolated standard nanoparticles which are disposed on the substrate in the vicinity of the isolated nanoparticles to be measured.