Nanopore Membrane Device with Insulating Side Wall Coating
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Solution Overview
Problem
The frequent clogging of DNA in nanopores during measurement leads to decreased throughput and damages the nanopore sensor when high voltage is applied to resolve clogging, resulting in reduced pressure resistance and lifetime.
Innovation Solution
A membrane device with a SiN film and semiconductor layer stacked on a Si substrate, where an insulating SiO2 film is formed on the side wall of the through hole in the semiconductor layer to reduce DNA clogging by minimizing interaction between the poly-Si film and DNA.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high voltage is applied to resolve DNA clogging in nanopores, then DNA clogging is resolved, but the nanopore sensor is damaged resulting in reduced pressure resistance and lifetime
Solution Approach 1:
A sacrificial semiconductor layer is introduced as an intermediary component between the membrane and the substrate. This layer absorbs mechanical stress and protects the nanopore sensor from damage during high voltage application, allowing repeated clogging resolution without compromising sensor integrity or reducing lifetime
2Measurement precision
If the membrane thickness is reduced to improve spatial resolution, then spatial resolution is improved, but the membrane becomes more fragile and prone to defects
Solution Approach 1:
The device employs a composite structure combining an ultra-thin membrane with a sacrificial semiconductor layer. This composite design allows the membrane to maintain minimal thickness (3-10 nm) for high spatial resolution while the sacrificial layer provides mechanical support and defect tolerance, preventing membrane failure
3Productivity
If DNA clogging occurs frequently, then measurement throughput decreases, but applying high voltage to resolve clogging damages the sensor
Solution Approach 1:
The sacrificial semiconductor layer is pre-installed to cushion and absorb the harmful effects of high voltage application before it reaches the nanopore sensor. This beforehand protection enables multiple clogging resolution events without cumulative damage, maintaining both throughput and sensor longevity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The frequency of nanopore clogging is significantly decreased, reducing the need for high voltage pulses and thus preserving the sensor's integrity and extending its operational time, while improving measurement throughput.
Implementation Method 1
an insulating film is formed on a side wall of a through hole included in the semiconductor layer
Implementation Method 2
DNA to be measured is put into one chamber and is made to electrophoretically pass through the nanopore by applying a potential difference between electrodes. When the DNA passes through the nanopore, an ion current flowing between both electrodes is changed.
Data Source
AI summary
The present invention provides a membrane device having a configuration capable of reducing the frequency of clogging of a sample in a nanopore when the sample passes through the nanopore. In the membrane device according to the present invention, a membrane and a semiconductor layer are stacked on a Si substrate, and an insulating film is formed on a side wall of a through hole included in the semiconductor layer.